Masayuki Hatano

Person

Kawasaki-Shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Imprint method, method of manufacturing semiconductor device, and i...
- Patent number 12,072,622
- Issue date Aug 27, 2024
- Kioxia Corporation
- Hirokazu Miyoshi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Imprint apparatus, imprint method, and manufacturing method of semi...
- Patent number 11,953,825
- Issue date Apr 9, 2024
- Kioxia Corporation
- Masayuki Hatano
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Imprint apparatus, imprint method, and method of manufacturing semi...
- Patent number 11,837,469
- Issue date Dec 5, 2023
- Kioxia Corporation
- Kazuya Fukuhara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Imprint apparatus, imprint method, and method of manufacturing semi...
- Patent number 11,004,683
- Issue date May 11, 2021
- TOSHIBA MEMORY CORPORATION
- Kazuya Fukuhara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Imprint template manufacturing apparatus and imprint template manuf...
- Patent number 10,773,425
- Issue date Sep 15, 2020
- Shibaura Mechatronics Corporation
- Kensuke Demura
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Imprint template treatment apparatus
- Patent number 10,668,496
- Issue date Jun 2, 2020
- Shibaura Mechatronics Corporation
- Satoshi Nakamura
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Imprint apparatus, imprint method, and article manufacturing method
- Patent number 10,168,615
- Issue date Jan 1, 2019
- Canon Kabushiki Kaisha
- Keiji Yamashita
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Template and pattern formation method
- Patent number 10,118,317
- Issue date Nov 6, 2018
- TOSHIBA MEMORY CORPORATION
- Yoshihisa Kawamura
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Template forming method, template, and template base material
- Patent number 9,885,118
- Issue date Feb 6, 2018
- TOSHIBA MEMORY CORPORATION
- Masatoshi Tsuji
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Pattern forming method, processing method, and processing apparatus
- Patent number RE46390
- Issue date May 2, 2017
- Kabushiki Kaisha Toshiba
- Masafumi Asano
Information Patent Grant
Fine processing method, fine processing apparatus, and recording me...
- Patent number 9,377,777
- Issue date Jun 28, 2016
- Kabushiki Kaisha Toshiba
- Yasutada Nakagawa
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Pattern formation method
- Patent number 9,360,752
- Issue date Jun 7, 2016
- Kabushiki Kaisha Toshiba
- Masatoshi Tsuji
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Imprint method and imprint apparatus
- Patent number 8,973,494
- Issue date Mar 10, 2015
- Kabushiki Kaisha Toshiba
- Masayuki Hatano
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Imprint method, imprinting equipment, and method for manufacturing...
- Patent number 8,906,281
- Issue date Dec 9, 2014
- Kabushiki Kaisha Toshiba
- Masayuki Hatano
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Semiconductor manufacturing apparatus and method for manufacturing...
- Patent number 8,901,012
- Issue date Dec 2, 2014
- Kabushiki Kaisha Toshiba
- Masayuki Hatano
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Pattern forming method, pattern forming apparatus, and method for m...
- Patent number 8,772,179
- Issue date Jul 8, 2014
- Kabushiki Kaisha Toshiba
- Kazuya Fukuhara
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Fine processing method, fine processing apparatus, and recording me...
- Patent number 8,691,123
- Issue date Apr 8, 2014
- Kabushiki Kaisha Toshiba
- Yasutada Nakagawa
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Imprint apparatus and method
- Patent number 8,550,801
- Issue date Oct 8, 2013
- Kabushiki Kaisha Toshiba
- Yohko Furutono
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Pattern forming method, processing method, and processing apparatus
- Patent number 8,420,422
- Issue date Apr 16, 2013
- Kabushiki Kaisha Toshiba
- Masafumi Asano
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Control method for semiconductor manufacturing apparatus, control s...
- Patent number 8,180,472
- Issue date May 15, 2012
- Kabushiki Kaisha Toshiba
- Masayuki Hatano
- G05 - CONTROLLING REGULATING
Information Patent Grant
Pattern formation method and a method for manufacturing a semicondu...
- Patent number 8,118,585
- Issue date Feb 21, 2012
- Kabushiki Kaisha Toshiba
- Masayuki Hatano
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Photomask, photomask superimposition correcting method, and manufac...
- Patent number 7,906,258
- Issue date Mar 15, 2011
- Kabushiki Kaisha Toshiba
- Nobuhiro Komine
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
IMPRINT METHOD AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
- Publication number 20240427234
- Publication date Dec 26, 2024
- KIOXIA Corporation
- Kazuya FUKUHARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
IMPRINT APPARATUS, IMPRINT METHOD, AND METHOD OF MANUFACTURING SEMI...
- Publication number 20240427233
- Publication date Dec 26, 2024
- KIOXIA Corporation
- Shunsuke HONDA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
IMPRINT METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, AND I...
- Publication number 20230288797
- Publication date Sep 14, 2023
- KIOXIA Corporation
- Hirokazu MIYOSHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
IMPRINT APPARATUS, IMPRINT METHOD, AND MANUFACTURING METHOD OF SEMI...
- Publication number 20230221635
- Publication date Jul 13, 2023
- KIOXIA Corporation
- Masayuki HATANO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TEMPLATE, MANUFACTURING METHOD OF TEMPLATE, AND MANUFACTURING METHO...
- Publication number 20220082934
- Publication date Mar 17, 2022
- KIOXIA Corporation
- Takahiro IWASAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
IMPRINT APPARATUS, IMPRINT METHOD, AND METHOD OF MANUFACTURING SEMI...
- Publication number 20210225638
- Publication date Jul 22, 2021
- Toshiba Memory Corporation
- Kazuya FUKUHARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
IMPRINT APPARATUS, IMPRINT METHOD, AND MANUFACTURING METHOD OF SEMI...
- Publication number 20200073233
- Publication date Mar 5, 2020
- Toshiba Memory Corporation
- Masayuki HATANO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
IMPRINT APPARATUS, IMPRINT METHOD, AND METHOD OF MANUFACTURING SEMI...
- Publication number 20190221421
- Publication date Jul 18, 2019
- Toshiba Memory Corporation
- Kazuya FUKUHARA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
IMPRINT TEMPLATE MANUFACTURING APPARATUS AND IMPRINT TEMPLATE MANUF...
- Publication number 20180117795
- Publication date May 3, 2018
- SHIBAURA MECHATRONICS CORPORATION
- Kensuke Demura
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
IMPRINT TEMPLATE MANUFACTURING APPARATUS AND IMPRINT TEMPLATE MANUF...
- Publication number 20180117796
- Publication date May 3, 2018
- SHIBAURA MECHATRONICS CORPORATION
- Kensuke Demura
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
TEMPLATE AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
- Publication number 20180119288
- Publication date May 3, 2018
- Toshiba Memory Corporation
- Masatoshi Tsuji
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TEMPLATE FOR IMPRINT
- Publication number 20180022016
- Publication date Jan 25, 2018
- SHIBAURA MECHATRONICS CORPORATION
- Satoshi NAKAMURA
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
IMPRINT TEMPLATE MANUFACTURING APPARATUS
- Publication number 20180016673
- Publication date Jan 18, 2018
- SHIBAURA MECHATRONICS CORPORATION
- Satoshi NAKAMURA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
IMPRINT TEMPLATE MANUFACTURING APPARATUS
- Publication number 20180015497
- Publication date Jan 18, 2018
- SHIBAURA MECHATRONICS CORPORATION
- Satoshi Nakamura
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
TEMPLATE AND PATTERN FORMATION METHOD
- Publication number 20160346962
- Publication date Dec 1, 2016
- Kabushiki Kaisha Toshiba
- Yoshihisa KAWAMURA
- B82 - NANO-TECHNOLOGY
Information Patent Application
TEMPLATE FORMING METHOD, TEMPLATE, AND TEMPLATE BASE MATERIAL
- Publication number 20160247673
- Publication date Aug 25, 2016
- Kabushiki Kaisha Toshiba
- Masatoshi TSUJI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PATTERN FORMING METHOD AND PATTERN FORMING APPARATUS
- Publication number 20160243753
- Publication date Aug 25, 2016
- Kabushiki Kaisha Toshiba
- Masayuki HATANO
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
TEMPLATE, TEMPLATE FORMING METHOD, AND SEMICONDUCTOR DEVICE MANUFAC...
- Publication number 20160056036
- Publication date Feb 25, 2016
- Kabushiki Kaisha Toshiba
- Hiroshi TOKUE
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
IMPRINT METHOD, TEMPLATE, AND IMPRINT APPARATUS
- Publication number 20150221501
- Publication date Aug 6, 2015
- Kabushiki Kaisha Toshiba
- Masatoshi Tsuji
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MOLD CLEANING APPARATUS AND MOLD CLEANING METHOD
- Publication number 20150054188
- Publication date Feb 26, 2015
- Kabushiki Kaisha Toshiba
- Takumi OTA
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
IMPRINT APPARATUS, IMPRINT METHOD, AND ARTICLE MANUFACTURING METHOD
- Publication number 20150014877
- Publication date Jan 15, 2015
- Canon Kabushiki Kaisha
- Keiji Yamashita
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
IMPRINT APPARATUS, IMPRINT METHOD, AND ARTICLE MANUFACTURING METHOD
- Publication number 20150014876
- Publication date Jan 15, 2015
- Canon Kabushiki Kaisha
- Keiji Yamashita
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
PATTERN FORMATION METHOD AND PATTERN FORMATION DEVICE
- Publication number 20140246808
- Publication date Sep 4, 2014
- Masatoshi TSUJI
- B82 - NANO-TECHNOLOGY
Information Patent Application
FINE PROCESSING METHOD, FINE PROCESSING APPARATUS, AND RECORDING ME...
- Publication number 20140200704
- Publication date Jul 17, 2014
- KABUSHIKI KAISHA TOSHIBA
- Yasutada NAKAGAWA
- B82 - NANO-TECHNOLOGY
Information Patent Application
SEMICONDUCTOR MANUFACTURING APPARATUS AND METHOD FOR MANUFACTURING...
- Publication number 20130224963
- Publication date Aug 29, 2013
- Masayuki HATANO
- B82 - NANO-TECHNOLOGY
Information Patent Application
PATTERN FORMING METHOD, PATTERN FORMING APPARATUS, AND METHOD FOR M...
- Publication number 20130217155
- Publication date Aug 22, 2013
- Kabushiki Kaisha Toshiba
- Kazuya Fukuhara
- B82 - NANO-TECHNOLOGY
Information Patent Application
IMPRINT METHOD, IMPRINTING EQUIPMENT, AND METHOD FOR MANUFACTURING...
- Publication number 20120244719
- Publication date Sep 27, 2012
- Masayuki HATANO
- B82 - NANO-TECHNOLOGY
Information Patent Application
FINE PROCESSING METHOD, FINE PROCESSING APPARATUS, AND RECORDING ME...
- Publication number 20120074605
- Publication date Mar 29, 2012
- Kabushiki Kaisha Toshiba
- Yasutada NAKAGAWA
- G05 - CONTROLLING REGULATING
Information Patent Application
IMPRINT APPARATUS AND METHOD
- Publication number 20120061882
- Publication date Mar 15, 2012
- Yohko Furutono
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
PATTERN FORMING METHOD, PROCESSING METHOD, AND PROCESSING APPARATUS
- Publication number 20110229988
- Publication date Sep 22, 2011
- Masafumi ASANO
- B82 - NANO-TECHNOLOGY

Masayuki Hatano

Person

Patents Grantslast 30 patents

Imprint method, method of manufacturing semiconductor device, and i...

Imprint apparatus, imprint method, and manufacturing method of semi...

Imprint apparatus, imprint method, and method of manufacturing semi...

Imprint apparatus, imprint method, and method of manufacturing semi...

Imprint template manufacturing apparatus and imprint template manuf...

Imprint template treatment apparatus

Imprint apparatus, imprint method, and article manufacturing method

Template and pattern formation method

Template forming method, template, and template base material

Pattern forming method, processing method, and processing apparatus

Fine processing method, fine processing apparatus, and recording me...

Pattern formation method

Imprint method and imprint apparatus

Imprint method, imprinting equipment, and method for manufacturing...

Semiconductor manufacturing apparatus and method for manufacturing...

Pattern forming method, pattern forming apparatus, and method for m...

Fine processing method, fine processing apparatus, and recording me...

Imprint apparatus and method

Pattern forming method, processing method, and processing apparatus

Control method for semiconductor manufacturing apparatus, control s...

Pattern formation method and a method for manufacturing a semicondu...

Photomask, photomask superimposition correcting method, and manufac...

Patents Applicationslast 30 patents

IMPRINT METHOD AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE

IMPRINT APPARATUS, IMPRINT METHOD, AND METHOD OF MANUFACTURING SEMI...

IMPRINT METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, AND I...

IMPRINT APPARATUS, IMPRINT METHOD, AND MANUFACTURING METHOD OF SEMI...

TEMPLATE, MANUFACTURING METHOD OF TEMPLATE, AND MANUFACTURING METHO...

IMPRINT APPARATUS, IMPRINT METHOD, AND METHOD OF MANUFACTURING SEMI...

IMPRINT APPARATUS, IMPRINT METHOD, AND MANUFACTURING METHOD OF SEMI...

IMPRINT APPARATUS, IMPRINT METHOD, AND METHOD OF MANUFACTURING SEMI...

IMPRINT TEMPLATE MANUFACTURING APPARATUS AND IMPRINT TEMPLATE MANUF...

IMPRINT TEMPLATE MANUFACTURING APPARATUS AND IMPRINT TEMPLATE MANUF...

TEMPLATE AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

TEMPLATE FOR IMPRINT

IMPRINT TEMPLATE MANUFACTURING APPARATUS

IMPRINT TEMPLATE MANUFACTURING APPARATUS

TEMPLATE AND PATTERN FORMATION METHOD

TEMPLATE FORMING METHOD, TEMPLATE, AND TEMPLATE BASE MATERIAL

PATTERN FORMING METHOD AND PATTERN FORMING APPARATUS

TEMPLATE, TEMPLATE FORMING METHOD, AND SEMICONDUCTOR DEVICE MANUFAC...

IMPRINT METHOD, TEMPLATE, AND IMPRINT APPARATUS

MOLD CLEANING APPARATUS AND MOLD CLEANING METHOD

IMPRINT APPARATUS, IMPRINT METHOD, AND ARTICLE MANUFACTURING METHOD

IMPRINT APPARATUS, IMPRINT METHOD, AND ARTICLE MANUFACTURING METHOD

PATTERN FORMATION METHOD AND PATTERN FORMATION DEVICE

FINE PROCESSING METHOD, FINE PROCESSING APPARATUS, AND RECORDING ME...

SEMICONDUCTOR MANUFACTURING APPARATUS AND METHOD FOR MANUFACTURING...

PATTERN FORMING METHOD, PATTERN FORMING APPARATUS, AND METHOD FOR M...

IMPRINT METHOD, IMPRINTING EQUIPMENT, AND METHOD FOR MANUFACTURING...

FINE PROCESSING METHOD, FINE PROCESSING APPARATUS, AND RECORDING ME...

IMPRINT APPARATUS AND METHOD

PATTERN FORMING METHOD, PROCESSING METHOD, AND PROCESSING APPARATUS