Masayuki HIROSE

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Nirasaki-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Source gas supply unit, film forming apparatus and source gas suppl...
- Patent number 10,113,235
- Issue date Oct 30, 2018
- Tokyo Electron Limited
- Masayuki Hirose
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Control device of substrate processing apparatus and control progra...
- Patent number 7,987,012
- Issue date Jul 26, 2011
- Tokyo Electron Limited
- Daisuke Morisawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
SOURCE GAS SUPPLY UNIT, FILM FORMING APPARATUS AND SOURCE GAS SUPPL...
- Publication number 20140290575
- Publication date Oct 2, 2014
- TOKYO ELECTRON LIMITED
- Masayuki HIROSE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR MANUFACTURING APPARATUS, METHOD OF MANAGING APPARATUS...
- Publication number 20100087944
- Publication date Apr 8, 2010
- TOKYO ELECTRON LIMITED
- Noriaki Kanaya
- G05 - CONTROLLING REGULATING
Information Patent Application
CONTROL DEVICE OF SUBSTRATE PROCESSING APPARATUS AND CONTROL PROGRA...
- Publication number 20080306615
- Publication date Dec 11, 2008
- TOKYO ELECTRON LIMITED
- Daisuke MORISAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...