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Masayuki Honda
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Kikuchi-gun, JP
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last 30 patents
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Patent Grant
Reduced pressure drying apparatus and reduced pressure drying method
Patent number
7,343,698
Issue date
Mar 18, 2008
Tokyo Electron Limited
Shinichi Sugimoto
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Patent Application
Reduced pressure drying apparatus and reduced pressure drying method
Publication number
20050229427
Publication date
Oct 20, 2005
Shinichi Sugimoto
H01 - BASIC ELECTRIC ELEMENTS