Masayuki Imai

Person

Kofu, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Method for manufacturing SOI wafer
- Patent number 8,956,951
- Issue date Feb 17, 2015
- Shin-Etsu Handotai Co., Ltd.
- Isao Yokokawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing SOI wafer and thus-manufactured SOI wafer
- Patent number 7,902,042
- Issue date Mar 8, 2011
- Shin-Etsu Handotai Co., Ltd.
- Hiroji Aga
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer support tool for heat treatment and heat treatment apparatus
- Patent number 7,393,207
- Issue date Jul 1, 2008
- Shin-Etsu Handotai Co., Ltd.
- Masayuki Imai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of fabricating semiconductor device
- Patent number 6,933,249
- Issue date Aug 23, 2005
- Tokyo Electron Limited
- Shin Yokoyama
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for forming insulating film containing silicon...
- Patent number 6,821,566
- Issue date Nov 23, 2004
- Tokyo Electron Limited
- Genji Nakamura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film forming method wherein a partial pressure of a reaction byprod...
- Patent number 5,503,875
- Issue date Apr 2, 1996
- Tokyo Electron Limited
- Masayuki Imai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Heat treatment boat
- Patent number 5,482,559
- Issue date Jan 9, 1996
- Tokyo Electron Kabushiki Kaisha
- Masayuki Imai
- C30 - CRYSTAL GROWTH

Patents Applicationslast 30 patents

Information Patent Application
METHOD FOR MANUFACTURING SOI WAFER
- Publication number 20120135584
- Publication date May 31, 2012
- Shin-Etsu Handotai Co., Ltd.
- Isao Yokokawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method Of Manufacturing Soi Wafer And Thus-Manufactured Soi Wafer
- Publication number 20080128851
- Publication date Jun 5, 2008
- Shin-Etsu Handotai Co., Ltd.
- Hiroji Aga
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Wafer Support Tool for Heat Treatment and Heat Treatment Apparatus
- Publication number 20070006806
- Publication date Jan 11, 2007
- Masayuki Imai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Temperature measuring system, heating device using it and productio...
- Publication number 20050063451
- Publication date Mar 24, 2005
- SHIN-ETSU HANDOTAI CO., LTD.
- Takao Abe
- E06 - DOORS, WINDOWS, SHUTTERS, OR ROLLER BLINDS IN GENERAL LADDERS
Information Patent Application
Method of fabricating semiconductor device
- Publication number 20040152339
- Publication date Aug 5, 2004
- Shin Yokoyama
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method and apparatus for forming insulating film containing silicon...
- Publication number 20030068437
- Publication date Apr 10, 2003
- Genji Nakamura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Masayuki Imai

Person

Patents Grantslast 30 patents

Method for manufacturing SOI wafer

Method of manufacturing SOI wafer and thus-manufactured SOI wafer

Wafer support tool for heat treatment and heat treatment apparatus

Method of fabricating semiconductor device

Method and apparatus for forming insulating film containing silicon...

Film forming method wherein a partial pressure of a reaction byprod...

Heat treatment boat

Patents Applicationslast 30 patents

METHOD FOR MANUFACTURING SOI WAFER

Method Of Manufacturing Soi Wafer And Thus-Manufactured Soi Wafer

Wafer Support Tool for Heat Treatment and Heat Treatment Apparatus

Temperature measuring system, heating device using it and productio...

Method of fabricating semiconductor device

Method and apparatus for forming insulating film containing silicon...