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Masayuki Inuga
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Kyoto, JP
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last 30 patents
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Patent Grant
Vibration sensor and method for manufacturing the vibration sensor
Patent number
7,943,413
Issue date
May 17, 2011
Omron Corporation
Takashi Kasai
B81 - MICRO-STRUCTURAL TECHNOLOGY
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last 30 patents
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Patent Application
VIBRATION SENSOR AND METHOD FOR MANUFACTURING THE VIBRATION SENSOR
Publication number
20100038734
Publication date
Feb 18, 2010
Omron Corporation
Takashi Kasai
B81 - MICRO-STRUCTURAL TECHNOLOGY