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Masayuki Itaba
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Kyoto, JP
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last 30 patents
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Patent Grant
Apparatus and method for detecting and conveying substrates in cass...
Patent number
5,906,469
Issue date
May 25, 1999
Dainippon Screen Mfg. Co., Ltd.
Yoshiji Oka
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Substrate transfer method and interface apparatus
Patent number
5,788,868
Issue date
Aug 4, 1998
Dainippon Screen Mfg. Co., Ltd.
Masayuki Itaba
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Device for holding and rotating a substrate
Patent number
5,376,216
Issue date
Dec 27, 1994
Dainippon Screen Mfg. Co., Ltd.
Katsushi Yoshioka
H01 - BASIC ELECTRIC ELEMENTS