Masayuki KAJIWARA

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Koshi City, JP

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Patents Grantslast 30 patents

Information Patent Grant
Treatment solution supply apparatus and substrate treatment system
- Patent number 10,807,027
- Issue date Oct 20, 2020
- Tokyo Electron Limited
- Katsunori Ichino
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Treatment solution supply method, treatment solution supply apparat...
- Patent number 10,023,477
- Issue date Jul 17, 2018
- Tokyo Electron Limited
- Masato Hayashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
TREATMENT SOLUTION SUPPLY APPARATUS AND SUBSTRATE TREATMENT SYSTEM
- Publication number 20190076763
- Publication date Mar 14, 2019
- TOKYO ELECTRON LIMITED
- Katsunori ICHINO
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
TREATMENT SOLUTION SUPPLY METHOD, TREATMENT SOLUTION SUPPLY APPARAT...
- Publication number 20150375170
- Publication date Dec 31, 2015
- TOKYO ELECTRON LIMITED
- Masato HAYASHI
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL