Masayuki Kamezawa

Follow

Person

Tokyo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus, substrate processing method, and su...
- Patent number 7,578,886
- Issue date Aug 25, 2009
- Ebara Corporation
- Kaoru Yamada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 7,476,290
- Issue date Jan 13, 2009
- Ebara Corporation
- Takayuki Saito
- B08 - CLEANING

Patents Applicationslast 30 patents

Information Patent Application
Substrate processing apparatus and substrate processing method
- Publication number 20090090397
- Publication date Apr 9, 2009
- Takayuki Saito
- B08 - CLEANING
Information Patent Application
Apparatus for cleaning a substrate having metal interconnects
- Publication number 20080017220
- Publication date Jan 24, 2008
- Masako Kodera
- B08 - CLEANING
Information Patent Application
Substrate processing apparatus, substrate processing method, and su...
- Publication number 20060234503
- Publication date Oct 19, 2006
- Kaoru Yamada
- B08 - CLEANING
Information Patent Application
Substrate processing apparatus and substrate processing method
- Publication number 20050092351
- Publication date May 5, 2005
- Takayuki Saito
- B08 - CLEANING
Information Patent Application
Substrate processing apparatus
- Publication number 20040216841
- Publication date Nov 4, 2004
- Kenya Ito
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Apparatus for cleaning a substrate having metal interconnects
- Publication number 20040177655
- Publication date Sep 16, 2004
- Masako Kodera
- B08 - CLEANING