Masayuki KOZAWA

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Hokkaido, JP

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Patents Grantslast 30 patents

Information Patent Grant
Semiconductor manufacturing apparatus and method for transferring w...
- Patent number 11,621,185
- Issue date Apr 4, 2023
- Tokyo Electron Limited
- Rintaro Takao
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SEMICONDUCTOR MANUFACTURING APPARATUS AND METHOD FOR TRANSFERRING W...
- Publication number 20210287920
- Publication date Sep 16, 2021
- TOKYO ELECTRON LIMITED
- Rintaro TAKAO
- H01 - BASIC ELECTRIC ELEMENTS