Masayuki Maruo

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Chiba, JP

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Patents Grantslast 30 patents

Information Patent Grant
Charged particle beam apparatus
- Patent number 8,513,627
- Issue date Aug 20, 2013
- SII NanoTechnology Inc.
- Masayuki Maruo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Scanning type charged particle beam microscope
- Patent number 6,683,307
- Issue date Jan 27, 2004
- Seiko Instruments Inc.
- Masayuki Maruo
- H01 - BASIC ELECTRIC ELEMENTS