Membership
Tour
Register
Log in
Masayuki Miyashita
Follow
Person
Warabi, JP
People
Overview
Industries
Organizations
People
Information
Impact
Patents Grants
last 30 patents
Information
Patent Grant
Fine positioning device, as for the stage of a scanning tunneling m...
Patent number
5,051,594
Issue date
Sep 24, 1991
Japan Ministry of International Trade and Industry
Nobuhiro Tsuda
B82 - NANO-TECHNOLOGY