Masayuki MOROI

Person

Yamanashi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Raw material gas supply apparatus, raw material gas supply method a...
- Patent number 10,385,457
- Issue date Aug 20, 2019
- Tokyo Electron Limited
- Hironori Yagi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Raw material supply method, raw material supply apparatus, and stor...
- Patent number 10,047,436
- Issue date Aug 14, 2018
- Tokyo Electron Limited
- Masayuki Moroi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gas supply mechanism, gas supplying method, film forming apparatus...
- Patent number 9,938,620
- Issue date Apr 10, 2018
- Tokyo Electron Limited
- Masayuki Moroi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Raw material gas supply apparatus
- Patent number 9,725,808
- Issue date Aug 8, 2017
- Tokyo Electron Limited
- Masayuki Moroi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Temperature measurement apparatus, method of measuring temperature...
- Patent number 9,002,674
- Issue date Apr 7, 2015
- Tokyo Electron Limited
- Masayuki Moroi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Temperature measurement apparatus, method of estimating temperature...
- Patent number 8,992,079
- Issue date Mar 31, 2015
- Tokyo Electron Limited
- Masayuki Moroi
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
SOURCE GAS SUPPLY METHOD, SOURCE GAS SUPPLY MECHANISM, AND FILM FOR...
- Publication number 20230167555
- Publication date Jun 1, 2023
- TOKYO ELECTRON LIMITED
- Tomoyuki GOMI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING APPARATUS, FILM FORMING METHOD, AND FILM FORMING SYSTEM
- Publication number 20230093323
- Publication date Mar 23, 2023
- TOKYO ELECTRON LIMITED
- Tadahiro ISHIZAKA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
RAW MATERIAL GAS SUPPLY APPARATUS, RAW MATERIAL GAS SUPPLY METHOD A...
- Publication number 20170159175
- Publication date Jun 8, 2017
- TOKYO ELECTRON LIMITED
- Hironori YAGI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SOURCE SUPPLY APPARATUS, SOURCE SUPPLY METHOD AND STORAGE MEDIUM
- Publication number 20160281231
- Publication date Sep 29, 2016
- TOKYO ELECTRON LIMITED
- Masayuki MOROI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Raw Material Supply Method, Raw Material Supply Apparatus, and Stor...
- Publication number 20160281226
- Publication date Sep 29, 2016
- TOKYO ELECTRON LIMITED
- Masayuki MOROI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SOURCE GAS SUPPLY APPARATUS AND FILM FORMING APPARATUS
- Publication number 20160115594
- Publication date Apr 28, 2016
- TOKYO ELECTRON LIMITED
- Masayuki MOROI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
RAW MATERIAL GAS SUPPLY APPARATUS
- Publication number 20160047047
- Publication date Feb 18, 2016
- TOKYO ELECTRON LIMITED
- Masayuki MOROI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Gas Supply Mechanism, Gas Supplying Method, Film Forming Apparatus...
- Publication number 20150275367
- Publication date Oct 1, 2015
- TOKYO ELECTRON LIMITED
- Masayuki MOROI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TEMPERATURE MEASUREMENT APPARATUS, METHOD OF ESTIMATING TEMPERATURE...
- Publication number 20130130187
- Publication date May 23, 2013
- TOKYO ELECTRON LIMITED
- Masayuki MOROI
- G01 - MEASURING TESTING
Information Patent Application
TEMPERATURE MEASUREMENT APPARATUS, METHOD OF MEASURING TEMPERATURE...
- Publication number 20120303313
- Publication date Nov 29, 2012
- TOKYO ELECTRON LIMITED
- Masayuki MOROI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM DEPOSITION DEVICE AND SUBSTRATE PROCESSING DEVICE
- Publication number 20110265725
- Publication date Nov 3, 2011
- TOKYO ELECTRON LIMITED
- Norihiko Tsuji
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM DEPOSITION SYSTEM
- Publication number 20110226178
- Publication date Sep 22, 2011
- TOKYO ELECTRON LIMITED
- Norihiko TSUJI
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
SUBSTRATE TREATING APPARATUS AND TREATING GAS EMITTING MECHANISM
- Publication number 20090038548
- Publication date Feb 12, 2009
- Tokyo Electron Limited
- Hachishiro Iizuka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Masayuki MOROI

Person

Patents Grantslast 30 patents

Raw material gas supply apparatus, raw material gas supply method a...

Raw material supply method, raw material supply apparatus, and stor...

Gas supply mechanism, gas supplying method, film forming apparatus...

Raw material gas supply apparatus

Temperature measurement apparatus, method of measuring temperature...

Temperature measurement apparatus, method of estimating temperature...

Patents Applicationslast 30 patents

SOURCE GAS SUPPLY METHOD, SOURCE GAS SUPPLY MECHANISM, AND FILM FOR...

FILM FORMING APPARATUS, FILM FORMING METHOD, AND FILM FORMING SYSTEM

RAW MATERIAL GAS SUPPLY APPARATUS, RAW MATERIAL GAS SUPPLY METHOD A...

SOURCE SUPPLY APPARATUS, SOURCE SUPPLY METHOD AND STORAGE MEDIUM

Raw Material Supply Method, Raw Material Supply Apparatus, and Stor...

SOURCE GAS SUPPLY APPARATUS AND FILM FORMING APPARATUS

RAW MATERIAL GAS SUPPLY APPARATUS

Gas Supply Mechanism, Gas Supplying Method, Film Forming Apparatus...

TEMPERATURE MEASUREMENT APPARATUS, METHOD OF ESTIMATING TEMPERATURE...

TEMPERATURE MEASUREMENT APPARATUS, METHOD OF MEASURING TEMPERATURE...

FILM DEPOSITION DEVICE AND SUBSTRATE PROCESSING DEVICE

FILM DEPOSITION SYSTEM

SUBSTRATE TREATING APPARATUS AND TREATING GAS EMITTING MECHANISM