Masayuki Nasu

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Yamanashi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Tungsten film forming method and storage medium
- Patent number 10,400,330
- Issue date Sep 3, 2019
- Tokyo Electron Limited
- Kenji Suzuki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film forming apparatus, gas supply device and film forming method
- Patent number 9,644,266
- Issue date May 9, 2017
- Tokyo Electron Limited
- Masayuki Nasu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for manufacturing semiconductor device and computer storage...
- Patent number 7,629,183
- Issue date Dec 8, 2009
- Tokyo Electron Limited
- Kenji Matsumoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for forming metallic tungsten film
- Patent number 6,964,790
- Issue date Nov 15, 2005
- Tokyo Electron Limited
- Masayuki Nasu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
TUNGSTEN FILM FORMING METHOD AND STORAGE MEDIUM
- Publication number 20170283942
- Publication date Oct 5, 2017
- TOKYO ELECTRON LIMITED
- Kenji SUZUKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING APPARATUS, GAS SUPPLY DEVICE AND FILM FORMING METHOD
- Publication number 20140295083
- Publication date Oct 2, 2014
- TOKYO ELECTRON LIMITED
- Masayuki NASU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method for Manufacturing Semiconductor Device and Computer Storage...
- Publication number 20080248595
- Publication date Oct 9, 2008
- Tokyo Electron Limited
- Kenji Matsumoto
- C30 - CRYSTAL GROWTH
Information Patent Application
Film Deposition Method And Film Deposition System
- Publication number 20080171142
- Publication date Jul 17, 2008
- Kenji Matsumoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...