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Masayuki SHINAGAWA
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Nagasaki, JP
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Patents Grants
last 30 patents
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Patent Grant
Epitaxial silicon wafer having reduced stacking faults
Patent number
9,755,022
Issue date
Sep 5, 2017
Sumco Techxiv Corporation
Tadashi Kawashima
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Method for growing an epitaxial film on a phosphorous-doped silicon...
Patent number
9,425,264
Issue date
Aug 23, 2016
Sumco Corporation
Tadashi Kawashima
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
MANUFACTURING METHOD OF EPITAXIAL SILICON WAFER, AND EPITAXIAL SILI...
Publication number
20150380493
Publication date
Dec 31, 2015
SUMCO CORPORATION
Tadashi KAWASHIMA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MANUFACTURING METHOD OF EPITAXIAL SILICON WAFER, AND EPITAXIAL SILI...
Publication number
20140001605
Publication date
Jan 2, 2014
Tadashi Kawashima
H01 - BASIC ELECTRIC ELEMENTS