Masayuki Tanaka

Person

Yamanashi-Ken, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Absorbance analysis apparatus for DCR gas, absorbance analysis meth...
- Patent number 11,796,460
- Issue date Oct 24, 2023
- Tokyo Electron Limited
- Yuichi Furuya
- G01 - MEASURING TESTING
Information Patent Grant
Film forming apparatus, source supply apparatus, and film forming m...
- Patent number 11,753,720
- Issue date Sep 12, 2023
- Tokyo Electron Limited
- Yuichi Furuya
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
Absorbance analysis apparatus for DCR gas, absorbance analysis meth...
- Publication number 20220307977
- Publication date Sep 29, 2022
- TOKYO ELECTRON LIMITED
- Yuichi FURUYA
- G01 - MEASURING TESTING
Information Patent Application
FILM FORMING APPARATUS SOURCE SUPPLY APPARATUS, AND FILM FORMING ME...
- Publication number 20200024740
- Publication date Jan 23, 2020
- TOKYO ELECTRON LIMITED
- Yuichi FURUYA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESSING APPARATUS USING SOURCE GAS AND REACTIVE GAS
- Publication number 20090211526
- Publication date Aug 27, 2009
- TOKYO ELECTRON LIMITED
- Masayuki TANAKA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Gas processing apparatus and gas processing method
- Publication number 20090151639
- Publication date Jun 18, 2009
- Shigeru Kasai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Processing Apparatus Using Source Gas and Reactive Gas
- Publication number 20070251452
- Publication date Nov 1, 2007
- Masayuki Tanaka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Gas treating device and gas treating method
- Publication number 20050003600
- Publication date Jan 6, 2005
- Shigeru Kasai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Treating device
- Publication number 20040020599
- Publication date Feb 5, 2004
- Sumi Tanaka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Processing apparatus
- Publication number 20020046810
- Publication date Apr 25, 2002
- Masayuki Tanaka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Masayuki Tanaka

Person

Patents Grantslast 30 patents

Absorbance analysis apparatus for DCR gas, absorbance analysis meth...

Film forming apparatus, source supply apparatus, and film forming m...

Patents Applicationslast 30 patents

Absorbance analysis apparatus for DCR gas, absorbance analysis meth...

FILM FORMING APPARATUS SOURCE SUPPLY APPARATUS, AND FILM FORMING ME...

PROCESSING APPARATUS USING SOURCE GAS AND REACTIVE GAS

Gas processing apparatus and gas processing method

Processing Apparatus Using Source Gas and Reactive Gas

Gas treating device and gas treating method

Treating device

Processing apparatus