Masayuki Tooyama

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Otake, JP

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Patents Grantslast 30 patents

Information Patent Grant
Chemical amplification resist composition
- Patent number 6,887,646
- Issue date May 3, 2005
- Mitsubishi Rayon Co., Ltd.
- Tadayuki Fujiwara
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Copolymer, process for producing the same, and resist composition
- Patent number 6,706,826
- Issue date Mar 16, 2004
- Mitsubishi Rayon Co., Ltd.
- Tadayuki Fujiwara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY