Masayuki YAMADA

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Toyama-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus and method of manufacturing semicond...
- Patent number 7,883,581
- Issue date Feb 8, 2011
- Hitachi Kokusai Electric, Inc.
- Naoharu Nakaiso
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICOND...
- Publication number 20090258504
- Publication date Oct 15, 2009
- Hitachi Kokusai Electric Inc.
- Naoharu NAKAISO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...