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Masoud Safa
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Cupertino, CA, US
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last 30 patents
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Patent Grant
Systems and methods for reducing beam instability in laser annealing
Patent number
9,559,023
Issue date
Jan 31, 2017
Ultratech, Inc.
James T. McWhirter
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Patents Applications
last 30 patents
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Patent Application
Systems and methods for reducing beam instability in laser annealing
Publication number
20150371911
Publication date
Dec 24, 2015
Ultratech, Inc.
James T. McWhirter
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR