Masumi NISHIJIMA

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Tokyo, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate cleaning method and substrate cleaning apparatus
- Patent number 11,817,311
- Issue date Nov 14, 2023
- Ebara Corporation
- Tomoatsu Ishibashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and substrate presence or absence ch...
- Patent number 10,157,762
- Issue date Dec 18, 2018
- Ebara Corporation
- Tomohiro Tanaka
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE CONVEYANCE METHOD, SUBSTRATE PROCESSING DEVICE, AND RECOR...
- Publication number 20230230863
- Publication date Jul 20, 2023
- EBARA CORPORATION
- MATSUTARO MIYAMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE CLEANING METHOD AND SUBSTRATE CLEANING APPARATUS
- Publication number 20200258737
- Publication date Aug 13, 2020
- EBARA CORPORATION
- Tomoatsu Ishibashi
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PRESENCE OR ABSENCE CH...
- Publication number 20170287755
- Publication date Oct 5, 2017
- EBARA CORPORATION
- Tomohiro TANAKA
- H01 - BASIC ELECTRIC ELEMENTS