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Masunori Ishihara
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Kudamatsu-shi, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Plasma processing method
Patent number
8,277,563
Issue date
Oct 2, 2012
Hitachi High-Technologies Corporation
Masunori Ishihara
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Dry etching method
Patent number
8,207,066
Issue date
Jun 26, 2012
Hitachi High-Technologies Corporation
Yoshiharu Inoue
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing method
Patent number
7,909,933
Issue date
Mar 22, 2011
Hitachi High-Technologies Corporation
Masunori Ishihara
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
PLASMA PROCESSING METHOD
Publication number
20110120495
Publication date
May 26, 2011
Masunori Ishihara
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DRY ETCHING METHOD
Publication number
20100255612
Publication date
Oct 7, 2010
Hitachi High-Technologies Corporation
Yoshiharu INOUE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING METHOD
Publication number
20090214401
Publication date
Aug 27, 2009
Masunori Ishihara
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA ETCHING METHOD FOR ETCHING SAMPLE
Publication number
20090081872
Publication date
Mar 26, 2009
Hitoshi Kobayashi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Plasma Processing Method
Publication number
20080216865
Publication date
Sep 11, 2008
Masunori Ishihara
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Dry etching method
Publication number
20060016781
Publication date
Jan 26, 2006
Kenichi Kuwabara
H01 - BASIC ELECTRIC ELEMENTS