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last 30 patents
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Patent Application
UPSTREAM PROCESS MONITORING FOR DEPOSITION AND ETCH CHAMBERS
Publication number
20240312812
Publication date
Sep 19, 2024
Inficon, Inc.
Matan Lapidot
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Application
SYSTEM AND METHOD FOR DECONVOLUTION OF REAL-TIME MASS FROM THE INFL...
Publication number
20240241083
Publication date
Jul 18, 2024
Inficon, Inc.
Chunhua Song
G01 - MEASURING TESTING
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Patent Application
SYSTEM AND METHOD FOR MONITORING SEMICONDUCTOR PROCESSES
Publication number
20230135167
Publication date
May 4, 2023
Inficon Inc.
Matan Lapidot
H01 - BASIC ELECTRIC ELEMENTS