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Matheus Anna Karel VAN LIEROP
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Eindhoven, NL
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Patents Grants
last 30 patents
Information
Patent Grant
Substrate table, immersion lithographic apparatus and device manufa...
Patent number
11,215,933
Issue date
Jan 4, 2022
ASML Netherlands B.V.
Marco Koert Stavenga
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate table, immersion lithographic apparatus and device manufa...
Patent number
10,451,980
Issue date
Oct 22, 2019
ASML Netherlands B.V.
Marco Koert Stavenga
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate table, immersion lithographic apparatus and device manufa...
Patent number
9,059,228
Issue date
Jun 16, 2015
ASML Netherlands B.V.
Marco Koert Stavenga
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Fluid handling structure, lithographic apparatus and device manufac...
Patent number
8,472,003
Issue date
Jun 25, 2013
ASML Netherlands B.V.
Hrishikesh Patel
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Patents Applications
last 30 patents
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Patent Application
SUBSTRATE TABLE, IMMERSION LITHOGRAPHIC APPARATUS AND DEVICE MANUFA...
Publication number
20220121131
Publication date
Apr 21, 2022
ASML NETHERLANDS B.V.
Marco Koert STAVENGA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SUBSTRATE TABLE, IMMERSION LITHOGRAPHIC APPARATUS AND DEVICE MANUFA...
Publication number
20200050116
Publication date
Feb 13, 2020
ASML NETHERLANDS B.V.
Marco Koert STAVENGA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SUBSTRATE TABLE, IMMERSION LITHOGRAPHIC APPARATUS AND DEVICE MANUFA...
Publication number
20170219936
Publication date
Aug 3, 2017
ASML NETHERLANDS B.V.
Marco Koert STAVENGA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SUBSTRATE TABLE, IMMERSION LITHOGRAPHIC APPARATUS AND DEVICE MANUFA...
Publication number
20150277238
Publication date
Oct 1, 2015
ASML NETHERLANDS B.V.
Marco Koert STAVENGA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY