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Mathias BARANYAI
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Nossen, DE
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Patents Grants
last 30 patents
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Patent Grant
Method and system for advanced process control in an etch system by...
Patent number
8,888,947
Issue date
Nov 18, 2014
Advanced Micro Devices, Inc.
Matthias Schaller
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
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Patent Grant
Method and system for advanced process control in an etch system by...
Patent number
7,704,889
Issue date
Apr 27, 2010
Advanced Micro Devices, Inc.
Matthias Schaller
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
METHOD AND SYSTEM FOR ADVANCED PROCESS CONTROL IN AN ETCH SYSTEM BY...
Publication number
20100161103
Publication date
Jun 24, 2010
Advanced Micro Devices, Inc.
Matthias SCHALLER
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD AND SYSTEM FOR ADVANCED PROCESS CONTROL IN AN ETCH SYSTEM BY...
Publication number
20070178699
Publication date
Aug 2, 2007
Matthias Schaller
H01 - BASIC ELECTRIC ELEMENTS