Mathias Irmscher

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Renningen, DE

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Patents Grantslast 30 patents

Information Patent Grant
Multi-beam deflector array device for maskless particle-beam proces...
- Patent number 7,687,783
- Issue date Mar 30, 2010
- IMS Nanofabrication AG
- Elmar Platzgummer
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
MULTI-BEAM DEFLECTOR ARRAY DEVICE FOR MASKLESS PARTICLE-BEAM PROCES...
- Publication number 20080203317
- Publication date Aug 28, 2008
- IMS Nanofabrication AG
- Elmar Platzgummer
- B82 - NANO-TECHNOLOGY