Mathias Rohde

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Jena, DE

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Patents Grantslast 30 patents

Information Patent Grant
Electrostatic deflection system for corpuscular radiation
- Patent number 7,491,946
- Issue date Feb 17, 2009
- Leica Microsystems Lithography GmbH
- Stefan Risse
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING

Patents Applicationslast 30 patents

Information Patent Application
Electrostatic deflection system for corpuscular radiation
- Publication number 20060192133
- Publication date Aug 31, 2006
- LEICA MICROSYSTEMS LITHOGRAPHY GmbH
- Stefan Risse
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING