Mats Ekberg

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Taby, SE

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Patents Grantslast 30 patents

Information Patent Grant
Method of iterative compensation for non-linear effects in three-di...
- Patent number 8,067,134
- Issue date Nov 29, 2011
- Micronic Mydata AB
- Torbjörn Sandström
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of compensation for bleaching of resist during three-dimensi...
- Patent number 8,057,971
- Issue date Nov 15, 2011
- Micronic Mydata AB
- Torbjörn Sandström
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Multi-focus method of enhanced three-dimensional exposure of resist
- Patent number 7,923,182
- Issue date Apr 12, 2011
- Micronic Laser Systems AB
- Torbjörn Sandström
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for error reduction in lithography
- Patent number 6,883,158
- Issue date Apr 19, 2005
- Micronic Laser Systems AB
- Torbjorn Sandstrom
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
METHOD OF ITERATIVE COMPENSATION FOR NON-LINEAR EFFECTS IN THREE-DI...
- Publication number 20100099035
- Publication date Apr 22, 2010
- Micronic Laser Systems AB
- Torbjörn Sandström
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MULTI-FOCUS METHOD OF ENHANCED THREE-DIMENSIONAL EXPOSURE OF RESIST
- Publication number 20100099051
- Publication date Apr 22, 2010
- Micronic Laser Systems AB
- Torbjörn Sandström
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD OF COMPENSATION FOR BLEACHING OF RESIST DURING THREE-DIMENSI...
- Publication number 20100099034
- Publication date Apr 22, 2010
- Micronic Laser Systems AB
- Torbjörn Sandström
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY