Matt Cheng-Hsiung TSAI

Person

Cupertino, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Cooling pedestal with coating of diamond-like carbon
- Patent number 10,053,778
- Issue date Aug 21, 2018
- Applied Materials, Inc.
- Vijay D. Parkhe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma cleaning apparatus and method
- Patent number 9,552,968
- Issue date Jan 24, 2017
- Applied Materials, Inc.
- Martin Deehan
- B08 - CLEANING
Information Patent Grant
Heated cooling plate for E-chucks and pedestals
- Patent number 9,064,911
- Issue date Jun 23, 2015
- Applied Materials, Inc.
- Shambhu N. Roy
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Heat exchange pedestal with coating of diamond-like material
- Patent number 8,852,348
- Issue date Oct 7, 2014
- Applied Materials, Inc.
- Vijay D Parkhe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma cleaning apparatus and method
- Patent number 8,721,796
- Issue date May 13, 2014
- Applied Materials, Inc.
- Martin Deehan
- B08 - CLEANING
Information Patent Grant
Coating for reducing contamination of substrates during processing
- Patent number 7,824,498
- Issue date Nov 2, 2010
- Applied Materials, Inc.
- Vijay D. Parkhe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for conserving energy within a process chamber
- Patent number 6,485,603
- Issue date Nov 26, 2002
- Applied Materials, Inc.
- Nelson Yee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High pressure/high temperature process chamber
- Patent number 5,990,453
- Issue date Nov 23, 1999
- Applied Materials, Inc.
- Ashok K. Das
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
COOLING PEDESTAL WITH COATING OF DIAMOND-LIKE CARBON
- Publication number 20140326184
- Publication date Nov 6, 2014
- Applied Materials, Inc.
- Vijay D. Parkhe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA CLEANING APPARATUS AND METHOD
- Publication number 20140283872
- Publication date Sep 25, 2014
- Applied Materials, Inc.
- Martin DEEHAN
- B08 - CLEANING
Information Patent Application
HEAT EXCHANGE PEDESTAL WITH COATING OF DIAMOND-LIKE MATERIAL
- Publication number 20110017424
- Publication date Jan 27, 2011
- Applied Materials, Inc.
- Vijay D. PARKHE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Contaminant reducing substrate transport and support system
- Publication number 20050252454
- Publication date Nov 17, 2005
- APPLIED MATERIALS, INC.
- Vijay D. Parkhe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Coating for reducing contamination of substrates during processing
- Publication number 20050183669
- Publication date Aug 25, 2005
- APPLIED MATERIALS, INC.
- Vijay D. Parkhe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Matt Cheng-Hsiung TSAI

Person

Patents Grantslast 30 patents

Cooling pedestal with coating of diamond-like carbon

Plasma cleaning apparatus and method

Heated cooling plate for E-chucks and pedestals

Heat exchange pedestal with coating of diamond-like material

Plasma cleaning apparatus and method

Coating for reducing contamination of substrates during processing

Method and apparatus for conserving energy within a process chamber

High pressure/high temperature process chamber

Patents Applicationslast 30 patents

COOLING PEDESTAL WITH COATING OF DIAMOND-LIKE CARBON

PLASMA CLEANING APPARATUS AND METHOD

HEAT EXCHANGE PEDESTAL WITH COATING OF DIAMOND-LIKE MATERIAL

Contaminant reducing substrate transport and support system

Coating for reducing contamination of substrates during processing