Matt Cheng-Hsiung Tsai

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Cupertino, CA, US

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Patents Applicationslast 30 patents

Information Patent Application
PLASMA CLEANING APPARATUS AND METHOD
- Publication number 20100101602
- Publication date Apr 29, 2010
- Applied Materials, Inc.
- Martin Deehan
- B08 - CLEANING
Information Patent Application
HEATED COOLING PLATE FOR E-CHUCKS AND PEDESTALS
- Publication number 20100101771
- Publication date Apr 29, 2010
- Applied Materials, Inc.
- Shambhu N. Roy
- H01 - BASIC ELECTRIC ELEMENTS