Matt Hankinson

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San Jose, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Methods and systems for lithography process control
- Patent number 7,767,956
- Issue date Aug 3, 2010
- KLA-Tencor Technologies Corp.
- Suresh Lakkapragada
- G01 - MEASURING TESTING
Information Patent Grant
Methods and systems for lithography process control
- Patent number 7,462,814
- Issue date Dec 9, 2008
- KLA-Tencor Technologies Corp.
- Suresh Lakkapragada
- G01 - MEASURING TESTING
Information Patent Grant
Method for process optimization and control by comparison between 2...
- Patent number 7,352,453
- Issue date Apr 1, 2008
- KLA-Tencor Technologies Corporation
- Walter D. Mieher
- G01 - MEASURING TESTING
Information Patent Grant
Methods and systems for lithography process control
- Patent number 6,987,572
- Issue date Jan 17, 2006
- KLA-Tencor Technologies Corp.
- Suresh Lakkapragada
- G01 - MEASURING TESTING
Information Patent Grant
Methods and systems for lithography process control
- Patent number 6,689,519
- Issue date Feb 10, 2004
- KLA-Tencor Technologies Corp.
- Kyle A. Brown
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for the production of process sensitive lithog...
- Patent number 6,673,638
- Issue date Jan 6, 2004
- KLA-Tencor Corporation
- Joseph J. Bendik
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
METHODS AND SYSTEMS FOR LITHOGRAPHY PROCESS CONTROL
- Publication number 20090079974
- Publication date Mar 26, 2009
- KLA-Tencor Technologies Corporation
- Suresh Lakkapragada
- G01 - MEASURING TESTING
Information Patent Application
Methods and systems for lithography process control
- Publication number 20060138366
- Publication date Jun 29, 2006
- KLA-Tencor Technologies Corp.
- Suresh Lakkapragada
- G01 - MEASURING TESTING
Information Patent Application
Method for process optimization and control by comparison between 2...
- Publication number 20040190008
- Publication date Sep 30, 2004
- KLA-Tencor Corporation
- Walter D. Mieher
- G01 - MEASURING TESTING
Information Patent Application
Methods and systems for lithography process control
- Publication number 20040005507
- Publication date Jan 8, 2004
- KLA-Tencor, Inc.
- Suresh Lakkapragada
- G01 - MEASURING TESTING
Information Patent Application
Methods and systems for lithography process control
- Publication number 20030148198
- Publication date Aug 7, 2003
- Suresh Lakkapragada
- G01 - MEASURING TESTING
Information Patent Application
Methods and systems for lithography process control
- Publication number 20020072001
- Publication date Jun 13, 2002
- Kyle A. Brown
- G01 - MEASURING TESTING