MATT PINNOW

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WOODBURY, MN, US

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Patents Grantslast 30 patents

Information Patent Grant
Topcoat material and use thereof in immersion lithography processes
- Patent number 7,521,172
- Issue date Apr 21, 2009
- International Business Machines Corporation
- Robert Allen David
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
TOPCOAT MATERIAL AND USE THEREOF IN IMMERSION LITHOGRAPHY PROCESSES
- Publication number 20070254237
- Publication date Nov 1, 2007
- International Business Machines Corporation
- ROBERT DAVID ALLEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY