Matthew A. Fuller

Person

Colorado Springs, CO, US

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate container with door gasket
- Patent number 12,354,897
- Issue date Jul 8, 2025
- Entegris, Inc.
- Aaron Vestal
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer container purge port assembly
- Patent number 12,322,625
- Issue date Jun 3, 2025
- Entegris, Inc.
- Matthew A. Fuller
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods of installing a purge fluid conditioning element into a sem...
- Patent number 12,315,749
- Issue date May 27, 2025
- Entegris, Inc.
- Matthew A. Fuller
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Handle for wafer carrier
- Patent number 12,255,084
- Issue date Mar 18, 2025
- Entegris, Inc.
- Jason T. Steffens
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate container with door gasket
- Patent number 12,068,183
- Issue date Aug 20, 2024
- Entegris, Inc.
- Aaron Vestal
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Membrane diffuser for a substrate container
- Patent number 11,901,205
- Issue date Feb 13, 2024
- Entegris, Inc.
- Mark V. Smith
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate container valve assemblies
- Patent number 11,869,787
- Issue date Jan 9, 2024
- Entegris, Inc.
- Matthew A Fuller
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Membrane diffuser for a substrate container
- Patent number 11,610,795
- Issue date Mar 21, 2023
- Entegris, Inc.
- Mark V. Smith
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer cushion
- Patent number 11,587,810
- Issue date Feb 21, 2023
- Entegris, Inc.
- Colton J. Harr
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Purge connectors and modules for a substrate container
- Patent number 11,551,957
- Issue date Jan 10, 2023
- Entegris, Inc.
- Shawn D. Eggum
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate cushion brace retainer
- Patent number 10,872,795
- Issue date Dec 22, 2020
- Entegris, Inc.
- Matthew A. Fuller
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer container with external passive getter module
- Patent number 10,734,264
- Issue date Aug 4, 2020
- Entegris, Inc.
- Jeffrey J. King
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer container with latching mechanism for large diameter wafers
- Patent number 10,723,525
- Issue date Jul 28, 2020
- Entegris, Inc.
- Barry Gregerson
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Grant
Internal purge diffuser with offset manifold
- Patent number 10,672,637
- Issue date Jun 2, 2020
- Entegris, Inc.
- Kyle Glavan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer support column with interlocking features
- Patent number 10,475,682
- Issue date Nov 12, 2019
- Entegris, Inc.
- Matthew Fuller
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer container with latching mechanism for large diameter wafers
- Patent number 10,173,812
- Issue date Jan 8, 2019
- Entegris, Inc.
- Barry Gregerson
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Grant
Wafer carrier
- Patent number 10,147,624
- Issue date Dec 4, 2018
- Entegris, Inc.
- Michael S. Adams
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer container with tubular environmental control components
- Patent number 10,043,696
- Issue date Aug 7, 2018
- Entegris, Inc.
- James A. Watson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Porous barrier for evenly distributed purge gas in a microenvironment
- Patent number 10,032,660
- Issue date Jul 24, 2018
- Entegris, Inc.
- John Burns
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer container with door guide and seal
- Patent number 9,673,075
- Issue date Jun 6, 2017
- Entegris, Inc.
- Barry Gregerson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer container with door interface seal
- Patent number 9,520,310
- Issue date Dec 13, 2016
- Entegris, Inc.
- Barry Gregerson
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Grant
Replaceable wafer support backstop
- Patent number 9,343,345
- Issue date May 17, 2016
- Entegris, Inc.
- Matthew A. Fuller
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Wafer carrier
- Patent number 9,312,157
- Issue date Apr 12, 2016
- Entegris, Inc.
- Michael S. Adams
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Porous barrier for evenly distributed purge gas in a microenvironment
- Patent number 9,054,144
- Issue date Jun 9, 2015
- Entegris, Inc.
- John Burns
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer container with tubular environmental control components
- Patent number 8,783,463
- Issue date Jul 22, 2014
- Entegris, Inc.
- James A. Watson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer container with door actuated wafer restraint
- Patent number 7,900,776
- Issue date Mar 8, 2011
- Entegris, Inc.
- John Burns
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Grant
Front opening substrate container with bottom plate
- Patent number 7,866,480
- Issue date Jan 11, 2011
- Entegris, Inc.
- John Burns
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
CMP retaining ring
- Patent number 7,857,683
- Issue date Dec 28, 2010
- Entegris, Inc.
- John Burns
- B24 - GRINDING POLISHING
Information Patent Grant
Wafer container and door with vibration dampening latching mechanism
- Patent number 7,677,393
- Issue date Mar 16, 2010
- Entegris, Inc.
- John Burns
- E05 - LOCKS KEYS WINDOW OR DOOR FITTINGS SAFES
Information Patent Grant
Wafer carrier door
- Patent number D611437
- Issue date Mar 9, 2010
- Entegris, Inc.
- John Burns
- D13 - Equipment for production, distribution, or transformation of energy

Patents Applicationslast 30 patents

Information Patent Application
METHODS AND APPARATUS FOR PURIFYING SUBSTRATE CONTAINERS
- Publication number 20250149363
- Publication date May 8, 2025
- Entegris, Inc.
- Matthew A. Fuller
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND DEVICE TO DISTRIBUTE GAS INTO A CONTAINER
- Publication number 20250029815
- Publication date Jan 23, 2025
- Entegris, Inc.
- Mark V. SMITH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MODULE RETAINER
- Publication number 20250029857
- Publication date Jan 23, 2025
- Entegris, Inc.
- Mark V. SMITH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND DEVICE TO DISTRIBUTE GAS INTO A CONTAINER
- Publication number 20250029858
- Publication date Jan 23, 2025
- Entegris, Inc.
- Mark V. SMITH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GUIDED DIFFUSION DEVICE BRACKETS AND METHODS FOR DIFFUSION DEVICE R...
- Publication number 20240412995
- Publication date Dec 12, 2024
- Entegris, Inc.
- Mark V. SMITH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND DEVICE TO DISTRIBUTE GAS INTO A CONTAINER
- Publication number 20240363380
- Publication date Oct 31, 2024
- Entegris, Inc.
- Mark V. Smith
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE CONTAINER SYSTEMS AND METHODS OF PURGING A SUBSTRATE CONT...
- Publication number 20240274454
- Publication date Aug 15, 2024
- Entegris, Inc.
- Ryan Madhu Jacob
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE CONTAINER WITH PURGE GAS DIFFUSER
- Publication number 20240222172
- Publication date Jul 4, 2024
- Entegris, Inc.
- Mark V. Smith
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR SUBSTRATE CARRYING CONTAINER WITH SUPPORT WALL FORMED...
- Publication number 20240162068
- Publication date May 16, 2024
- Entegris, Inc.
- Jack Dunlope
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE CONTAINER SYSTEMS AND METHODS OF PURGING A SUBSTRATE CONT...
- Publication number 20240096671
- Publication date Mar 21, 2024
- Entegris, Inc.
- Matthew A. Fuller
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PURGING GAS AMPLIFIER
- Publication number 20230411191
- Publication date Dec 21, 2023
- Entegris, Inc.
- Matthew A. Fuller
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FILTER MODULE
- Publication number 20230411192
- Publication date Dec 21, 2023
- Entegris, Inc.
- Matthew A. Fuller
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PURGE FLOW DISTRIBUTION SYSTEM FOR A SUBSTRATE CONTAINER AND METHOD...
- Publication number 20230377925
- Publication date Nov 23, 2023
- Entegris, Inc.
- Mark V. Smith
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INTEGRAL SEAL FOR CONTAINER
- Publication number 20230377923
- Publication date Nov 23, 2023
- Entegris, Inc.
- William J. Shaner
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE CONTAINER WITH DOOR GASKET
- Publication number 20230369087
- Publication date Nov 16, 2023
- Entegris, Inc.
- Aaron Vestal
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER CONTAINER PURGE PORT ASSEMBLY
- Publication number 20230307275
- Publication date Sep 28, 2023
- Entegris, Inc.
- Matthew A. Fuller
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE CONTAINER WITH MECHANICALLY ACTUATED EXHAUST VALVE
- Publication number 20230245908
- Publication date Aug 3, 2023
- Entegris, Inc.
- Matthew A. Fuller
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MEMBRANE DIFFUSER FOR A SUBSTRATE CONTAINER
- Publication number 20230197490
- Publication date Jun 22, 2023
- Entegris, Inc.
- Mark V. SMITH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS OF INSTALLING A PURGE FLUID CONDITIONING ELEMENT INTO A SEM...
- Publication number 20230197489
- Publication date Jun 22, 2023
- Entegris, Inc.
- Matthew A. FULLER
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND DEVICE TO REGULATE PURGE INTO A CONTAINER
- Publication number 20230131451
- Publication date Apr 27, 2023
- Entegris, Inc.
- Matthew A. Fuller
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PURGE FLOW DISTRIBUTION SYSTEM FOR A SUBSTRATE CONTAINER AND METHOD...
- Publication number 20230128154
- Publication date Apr 27, 2023
- Entegris, Inc.
- Mark V. Smith
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE CONTAINER WITH DOOR GASKET
- Publication number 20220406637
- Publication date Dec 22, 2022
- Entegris, Inc.
- Aaron Vestal
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER CONTAINER AND PURGE SYSTEM
- Publication number 20220388751
- Publication date Dec 8, 2022
- Entegris, Inc.
- Matthew A. Fuller
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Application
SEMICONDUCTOR SUBSTRATE CARRYING CONTAINER WITH INCREASED DIAMETER...
- Publication number 20220384227
- Publication date Dec 1, 2022
- Entegris, Inc.
- Matthew A. Fuller
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR SUBSTRATE CARRYING CONTAINER WITH FRONT AND REAR OPEN...
- Publication number 20220293446
- Publication date Sep 15, 2022
- Entegris, Inc.
- Matthew A. Fuller
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HANDLE FOR WAFER CARRIER
- Publication number 20220230900
- Publication date Jul 21, 2022
- Entegris, Inc.
- Jason T. STEFFENS
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
REMOTE OPTIMIZATION OF PURGE FLOW RATES IN A CONTAINER
- Publication number 20220208582
- Publication date Jun 30, 2022
- Entegris, Inc.
- Matthew A. Fuller
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MANIFOLD FOR A SUBSTRATE CONTAINER
- Publication number 20210280446
- Publication date Sep 9, 2021
- Entegris, Inc.
- Matthew FULLER
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER CUSHION
- Publication number 20210020482
- Publication date Jan 21, 2021
- Entegris, Inc.
- Colton J. HARR
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE CONTAINER VALVE ASSEMBLIES
- Publication number 20200365435
- Publication date Nov 19, 2020
- Entegris, Inc.
- Matthew A. FULLER
- H01 - BASIC ELECTRIC ELEMENTS

Matthew A. Fuller

Person

Patents Grantslast 30 patents

Substrate container with door gasket

Wafer container purge port assembly

Methods of installing a purge fluid conditioning element into a sem...

Handle for wafer carrier

Substrate container with door gasket

Membrane diffuser for a substrate container

Substrate container valve assemblies

Membrane diffuser for a substrate container

Wafer cushion

Purge connectors and modules for a substrate container

Substrate cushion brace retainer

Wafer container with external passive getter module

Wafer container with latching mechanism for large diameter wafers

Internal purge diffuser with offset manifold

Wafer support column with interlocking features

Wafer container with latching mechanism for large diameter wafers

Wafer carrier

Wafer container with tubular environmental control components

Porous barrier for evenly distributed purge gas in a microenvironment

Wafer container with door guide and seal

Wafer container with door interface seal

Replaceable wafer support backstop

Wafer carrier

Porous barrier for evenly distributed purge gas in a microenvironment

Wafer container with tubular environmental control components

Wafer container with door actuated wafer restraint

Front opening substrate container with bottom plate

CMP retaining ring

Wafer container and door with vibration dampening latching mechanism

Wafer carrier door

Patents Applicationslast 30 patents

METHODS AND APPARATUS FOR PURIFYING SUBSTRATE CONTAINERS

METHOD AND DEVICE TO DISTRIBUTE GAS INTO A CONTAINER

MODULE RETAINER

METHOD AND DEVICE TO DISTRIBUTE GAS INTO A CONTAINER

GUIDED DIFFUSION DEVICE BRACKETS AND METHODS FOR DIFFUSION DEVICE R...

METHOD AND DEVICE TO DISTRIBUTE GAS INTO A CONTAINER

SUBSTRATE CONTAINER SYSTEMS AND METHODS OF PURGING A SUBSTRATE CONT...

SUBSTRATE CONTAINER WITH PURGE GAS DIFFUSER

SEMICONDUCTOR SUBSTRATE CARRYING CONTAINER WITH SUPPORT WALL FORMED...

SUBSTRATE CONTAINER SYSTEMS AND METHODS OF PURGING A SUBSTRATE CONT...

PURGING GAS AMPLIFIER

FILTER MODULE

PURGE FLOW DISTRIBUTION SYSTEM FOR A SUBSTRATE CONTAINER AND METHOD...

INTEGRAL SEAL FOR CONTAINER

SUBSTRATE CONTAINER WITH DOOR GASKET

WAFER CONTAINER PURGE PORT ASSEMBLY

SUBSTRATE CONTAINER WITH MECHANICALLY ACTUATED EXHAUST VALVE

MEMBRANE DIFFUSER FOR A SUBSTRATE CONTAINER

METHODS OF INSTALLING A PURGE FLUID CONDITIONING ELEMENT INTO A SEM...

METHOD AND DEVICE TO REGULATE PURGE INTO A CONTAINER

PURGE FLOW DISTRIBUTION SYSTEM FOR A SUBSTRATE CONTAINER AND METHOD...

SUBSTRATE CONTAINER WITH DOOR GASKET

WAFER CONTAINER AND PURGE SYSTEM

SEMICONDUCTOR SUBSTRATE CARRYING CONTAINER WITH INCREASED DIAMETER...

SEMICONDUCTOR SUBSTRATE CARRYING CONTAINER WITH FRONT AND REAR OPEN...

HANDLE FOR WAFER CARRIER

REMOTE OPTIMIZATION OF PURGE FLOW RATES IN A CONTAINER

MANIFOLD FOR A SUBSTRATE CONTAINER

WAFER CUSHION

SUBSTRATE CONTAINER VALVE ASSEMBLIES