Matthew A. Rigsby

Person

Lake Oswego, OR, US

People

Patents Grantslast 30 patents

Information Patent Grant
Process for optimizing cobalt electrofill using sacrificial oxidants
- Patent number 11,078,591
- Issue date Aug 3, 2021
- Lam Research Corporation
- Lee J. Brogan
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Process for optimizing cobalt electrofill using sacrificial oxidants
- Patent number 10,329,683
- Issue date Jun 25, 2019
- Lam Research Corporation
- Lee J. Brogan
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Chemistry additives and process for cobalt film electrodeposition
- Patent number 9,777,386
- Issue date Oct 3, 2017
- Lam Research Corporation
- Natalia V. Doubina
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR

Patents Applicationslast 30 patents

Information Patent Application
LEVELING COMPOUND CONTROL
- Publication number 20230144437
- Publication date May 11, 2023
- LAM RESEARCH CORPORATION
- Matthew A. Rigsby
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
ELECTRODEPOSITION OF COBALT TUNGSTEN FILMS
- Publication number 20220102209
- Publication date Mar 31, 2022
- LAM RESEARCH CORPORATION
- Tighe A. Spurlin
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
PROCESS FOR OPTIMIZING COBALT ELECTROFILL USING SACRIFICIAL OXIDANTS
- Publication number 20190271094
- Publication date Sep 5, 2019
- LAM RESEARCH CORPORATION
- Lee J. Brogan
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
PROCESS FOR OPTIMIZING COBALT ELECTROFILL USING SACRIFICIAL OXIDANTS
- Publication number 20180119305
- Publication date May 3, 2018
- LAM RESEARCH CORPORATION
- Lee J. Brogan
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
CHEMISTRY ADDITIVES AND PROCESS FOR COBALT FILM ELECTRODEPOSITION
- Publication number 20160273117
- Publication date Sep 22, 2016
- LAM RESEARCH CORPORATION
- Natalia V. Doubina
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
METHOD AND APPARATUS FOR PREPARING A SUBSTRATE WITH A SEMI-NOBLE ME...
- Publication number 20150299886
- Publication date Oct 22, 2015
- LAM RESEARCH CORPORATION
- Natalia V. Doubina
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR

Matthew A. Rigsby

Person

Patents Grantslast 30 patents

Process for optimizing cobalt electrofill using sacrificial oxidants

Process for optimizing cobalt electrofill using sacrificial oxidants

Chemistry additives and process for cobalt film electrodeposition

Patents Applicationslast 30 patents

LEVELING COMPOUND CONTROL

ELECTRODEPOSITION OF COBALT TUNGSTEN FILMS

PROCESS FOR OPTIMIZING COBALT ELECTROFILL USING SACRIFICIAL OXIDANTS

PROCESS FOR OPTIMIZING COBALT ELECTROFILL USING SACRIFICIAL OXIDANTS

CHEMISTRY ADDITIVES AND PROCESS FOR COBALT FILM ELECTRODEPOSITION

METHOD AND APPARATUS FOR PREPARING A SUBSTRATE WITH A SEMI-NOBLE ME...