Matthew Anthony SORNA

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Washington, DC, US

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Patents Grantslast 30 patents

Information Patent Grant
Lithographic apparatus, substrate table, and method
- Patent number 11,988,971
- Issue date May 21, 2024
- ASML Holding N.V.
- Matthew Lipson
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
LITHOGRAPHIC APPARATUS, SUBSTRATE TABLE, AND METHOD
- Publication number 20220082953
- Publication date Mar 17, 2022
- ASML Holding N.V.
- Matthew LIPSON
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY