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Matthew Busche
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Santa Clara, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Substrate support with real time force and film stress control
Patent number
11,915,913
Issue date
Feb 27, 2024
Applied Materials, Inc.
Wendell Glenn Boyd
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Thermal switch
Patent number
11,740,037
Issue date
Aug 29, 2023
Envertic Thermal Systems, LLC
Matthew Busche
F28 - HEAT EXCHANGE IN GENERAL
Information
Patent Grant
Substrate support with real time force and film stress control
Patent number
11,676,802
Issue date
Jun 13, 2023
Applied Materials, Inc.
Wendell Glenn Boyd
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Thermal switch
Patent number
11,204,206
Issue date
Dec 21, 2021
ENVERTIC THERMAL SYSTEMS, LLC
Matthew Busche
F28 - HEAT EXCHANGE IN GENERAL
Information
Patent Grant
Thermal switch
Patent number
11,041,682
Issue date
Jun 22, 2021
ENVERTIC THERMAL SYSTEMS, LLC
Matthew Busche
F28 - HEAT EXCHANGE IN GENERAL
Information
Patent Grant
Heater pedestal assembly for wide range temperature control
Patent number
10,910,238
Issue date
Feb 2, 2021
Applied Materials, Inc.
Kaushik Alayavalli
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Edge seal configurations for a lower electrode assembly
Patent number
10,892,197
Issue date
Jan 12, 2021
Lam Research Corporation
Keith William Gaff
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate support with real time force and film stress control
Patent number
10,879,046
Issue date
Dec 29, 2020
Applied Materials, Inc.
Wendell Glen Boyd
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Thermal switch
Patent number
10,866,036
Issue date
Dec 15, 2020
ENVERTIC THERMAL SYSTEMS, LLC
Matthew Busche
F28 - HEAT EXCHANGE IN GENERAL
Information
Patent Grant
Apparatus, systems, and methods for temperature control of substrat...
Patent number
10,736,182
Issue date
Aug 4, 2020
Applied Materials, Inc.
Matthew Busche
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Optical fiber temperature sensors, temperature monitoring apparatus...
Patent number
10,520,371
Issue date
Dec 31, 2019
Applied Materials, Inc.
Matthew Busche
C03 - GLASS MINERAL OR SLAG WOOL
Information
Patent Grant
Real time monitoring with closed loop chucking force control
Patent number
10,460,916
Issue date
Oct 29, 2019
Applied Materials, Inc.
Wendell Glenn Boyd
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Pixilated cooling, temperature controlled substrate support assembly
Patent number
10,403,534
Issue date
Sep 3, 2019
Applied Materials, Inc.
Vijay D. Parkhe
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus and method for measurement of the thermal performance of...
Patent number
10,395,964
Issue date
Aug 27, 2019
Applied Materials, Inc.
Matthew J. Busche
G01 - MEASURING TESTING
Information
Patent Grant
Electrostatic chuck with external flow adjustments for improved tem...
Patent number
10,121,688
Issue date
Nov 6, 2018
Applied Materials, Inc.
Matthew J. Busche
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Edge seal for lower electrode assembly
Patent number
10,090,211
Issue date
Oct 2, 2018
Lam Research Corporation
Keith William Gaff
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Temperature control apparatus including groove-routed optical fiber...
Patent number
9,986,598
Issue date
May 29, 2018
Applied Materials, Inc.
Matthew Busche
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Control systems employing deflection sensors to control clamping fo...
Patent number
9,875,923
Issue date
Jan 23, 2018
Applied Materials, Inc.
Wendell Boyd
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus and method for measurement of the thermal performance of...
Patent number
9,831,111
Issue date
Nov 28, 2017
Applied Materials, Inc.
Matthew J. Busche
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate temperature control apparatus including optical fiber hea...
Patent number
9,698,041
Issue date
Jul 4, 2017
Applied Materials, Inc.
Matthew Busche
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electrostatic chuck with external flow adjustments for improved tem...
Patent number
9,622,375
Issue date
Apr 11, 2017
Applied Materials, Inc.
Matthew J. Busche
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Control systems employing deflection sensors to control clamping fo...
Patent number
9,558,981
Issue date
Jan 31, 2017
Applied Materials, Inc.
Wendell Boyd
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electrostatic chuck with internal flow adjustments for improved tem...
Patent number
9,520,315
Issue date
Dec 13, 2016
Applied Materials, Inc.
Vijay D. Parkhe
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Temperature controlled window of a plasma processing chamber component
Patent number
8,970,114
Issue date
Mar 3, 2015
Lam Research Corporation
Matt Busche
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus and method for temperature control of a semiconductor sub...
Patent number
8,410,393
Issue date
Apr 2, 2013
Lam Research Corporation
Anthony Ricci
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
SUBSTRATE SUPPORT WITH REAL TIME FORCE AND FILM STRESS CONTROL
Publication number
20240258075
Publication date
Aug 1, 2024
Applied Materials, Inc.
Wendell Glenn BOYD
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SUBSTRATE SUPPORT WITH REAL TIME FORCE AND FILM STRESS CONTROL
Publication number
20230253188
Publication date
Aug 10, 2023
Applied Materials, Inc.
Wendell Glenn BOYD
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Thermal Switch
Publication number
20210356220
Publication date
Nov 18, 2021
ENVERTIC THERMAL SYSTEMS, LLC
Matthew Busche
F28 - HEAT EXCHANGE IN GENERAL
Information
Patent Application
SUBSTRATE SUPPORT WITH REAL TIME FORCE AND FILM STRESS CONTROL
Publication number
20210066038
Publication date
Mar 4, 2021
Applied Materials, Inc.
Wendell Glenn BOYD
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
THERMAL SWITCH
Publication number
20200333091
Publication date
Oct 22, 2020
ENVERTIC THERMAL SYSTEMS, LLC
Matthew Busche
F28 - HEAT EXCHANGE IN GENERAL
Information
Patent Application
Edge Seal Configurations For A Lower Electrode Assembly
Publication number
20180366379
Publication date
Dec 20, 2018
LAM RESEARCH CORPORATION
Keith William Gaff
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
REAL TIME MONITORING WITH CLOSED LOOP CHUCKING FORCE CONTROL
Publication number
20180330926
Publication date
Nov 15, 2018
Applied Materials, Inc.
Wendell Glenn BOYD
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
HEATER PEDESTAL ASSEMBLY FOR WIDE RANGE TEMPERATURE CONTROL
Publication number
20180082866
Publication date
Mar 22, 2018
Applied Materials, Inc.
Kaushik ALAYAVALLI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS AND METHOD FOR MEASUREMENT OF THE THERMAL PERFORMANCE OF...
Publication number
20180047607
Publication date
Feb 15, 2018
Applied Materials, Inc.
Matthew J. Busche
G01 - MEASURING TESTING
Information
Patent Application
ELECTROSTATIC CHUCK WITH EXTERNAL FLOW ADJUSTMENTS FOR IMPROVED TEM...
Publication number
20170213754
Publication date
Jul 27, 2017
Matthew J. Busche
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
OPTICAL FIBER TEMPERATURE SENSORS, TEMPERATURE MONITORING APPARATUS...
Publication number
20170115169
Publication date
Apr 27, 2017
Applied Materials, Inc.
Matthew Busche
G02 - OPTICS
Information
Patent Application
CONTROL SYSTEMS EMPLOYING DEFLECTION SENSORS TO CONTROL CLAMPING FO...
Publication number
20170103911
Publication date
Apr 13, 2017
Applied Materials, Inc.
Wendell BOYD
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE SUPPORT WITH REAL TIME FORCE AND FILM STRESS CONTROL
Publication number
20170076915
Publication date
Mar 16, 2017
Applied Materials, Inc.
Wendell Glen BOYD
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS, SYSTEMS, AND METHODS FOR TEMPERATURE CONTROL OF SUBSTRAT...
Publication number
20160007412
Publication date
Jan 7, 2016
Applied Materials, Inc.
Matthew Busche
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
TEMPERATURE CONTROL APPARATUS INCLUDING GROOVE-ROUTED OPTICAL FIBER...
Publication number
20160007411
Publication date
Jan 7, 2016
Applied Materials, Inc.
Matthew Busche
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
SUBSTRATE TEMPERATURE CONTROL APPARATUS INCLUDING OPTICAL FIBER HEA...
Publication number
20150357228
Publication date
Dec 10, 2015
Applied Materials, Inc.
Matthew Busche
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS AND METHOD FOR MEASUREMENT OF THE THERMAL PERFORMANCE OF...
Publication number
20150226611
Publication date
Aug 13, 2015
Matthew J. Busche
G01 - MEASURING TESTING
Information
Patent Application
ELECTROSTATIC CHUCK WITH INTERNAL FLOW ADJUSTMENTS FOR IMPROVED TEM...
Publication number
20150187626
Publication date
Jul 2, 2015
Vijay D. Parkhe
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
EDGE SEAL FOR LOWER ELECTRODE ASSEMBLY
Publication number
20150187614
Publication date
Jul 2, 2015
LAM RESEARCH CORPORATION
Keith William Gaff
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ELECTROSTATIC CHUCK WITH EXTERNAL FLOW ADJUSTMENTS FOR IMPROVED TEM...
Publication number
20150187625
Publication date
Jul 2, 2015
Matthew J. Busche
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CONTROL SYSTEMS EMPLOYING DEFLECTION SENSORS TO CONTROL CLAMPING FO...
Publication number
20150138687
Publication date
May 21, 2015
Applied Materials, Inc.
Wendell BOYD
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PIXILATED COOLING, TEMPERATURE CONTROLLED SUBSTRATE SUPPORT ASSEMBLY
Publication number
20150129165
Publication date
May 14, 2015
Applied Materials, Inc.
Vijay D. PARKHE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
TEMPERATURE CONTROLLED WINDOW OF A PLASMA PROCESSING CHAMBER COMPONENT
Publication number
20140217895
Publication date
Aug 7, 2014
LAM RESEARCH CORPORATION
Matt Busche
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS AND METHOD FOR TEMPERATURE CONTROL OF A SEMICONDUCTOR SUB...
Publication number
20110284505
Publication date
Nov 24, 2011
LAM RESEARCH CORPORATION
Anthony Ricci
H01 - BASIC ELECTRIC ELEMENTS