Membership
Tour
Register
Log in
Matthew C. Farrell
Follow
Person
Salem, MA, US
People
Overview
Industries
Organizations
People
Information
Impact
Patents Grants
last 30 patents
Information
Patent Grant
Plasma generation system
Patent number
10,153,134
Issue date
Dec 11, 2018
Nissin Ion Equipment Co., Ltd.
Sami K. Hahto
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
Systems and Methods for Substrate Cooling
Publication number
20200294819
Publication date
Sep 17, 2020
Nissin Ion Equipment Co., Ltd.
Sami K. Hahto
H01 - BASIC ELECTRIC ELEMENTS