Matthew Carnes

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Chicago, IL, US

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Patents Grantslast 30 patents

Information Patent Grant
Method to increase barrier film removal rate in bulk tungsten slurry
- Patent number 11,597,854
- Issue date Mar 7, 2023
- CMC Materials, Inc.
- William J. Ward
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Tungsten processing slurry with catalyst
- Patent number 10,066,126
- Issue date Sep 4, 2018
- Cabot Microelectronics Corporation
- Kevin P. Dockery
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...

Patents Applicationslast 30 patents

Information Patent Application
METHOD TO INCREASE BARRIER FILM REMOVAL RATE IN BULK TUNGSTEN SLURRY
- Publication number 20210017421
- Publication date Jan 21, 2021
- Cabot Microelectronics Corporation
- William J. WARD
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TUNGSTEN BULK POLISHING METHOD WITH IMPROVED TOPOGRAPHY
- Publication number 20190211228
- Publication date Jul 11, 2019
- Cabot Microelectronics Corporation
- William J. Ward
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COMPOSITION FOR TUNGSTEN CMP
- Publication number 20190085209
- Publication date Mar 21, 2019
- Cabot Microelectronics Corporation
- Kevin P. DOCKERY
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TUNGSTEN PROCESSING SLURRY WITH CATALYST
- Publication number 20170190936
- Publication date Jul 6, 2017
- Cabot Microelectronics Corporation
- Kevin P. Dockery
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...