Matthew D. Scotney-Castle

Person

Morgan-Hill, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Plasma-enhanced anneal chamber for wafer outgassing
- Patent number 11,348,769
- Issue date May 31, 2022
- Applied Materials, Inc.
- Lara Hawrylchak
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma-enhanced anneal chamber for wafer outgassing
- Patent number 10,770,272
- Issue date Sep 8, 2020
- Applied Materials, Inc.
- Lara Hawrylchak
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Temperature controlled remote plasma clean for exhaust deposit removal
- Patent number 10,500,614
- Issue date Dec 10, 2019
- Applied Materials, Inc.
- Martin A. Hilkene
- C30 - CRYSTAL GROWTH
Information Patent Grant
Material deposition for high aspect ratio structures
- Patent number 10,276,369
- Issue date Apr 30, 2019
- Applied Materials, Inc.
- Jun Xue
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Demagnetization of magnetic media by C doping for HDD patterned med...
- Patent number 10,233,538
- Issue date Mar 19, 2019
- Applied Materials, Inc.
- Martin A. Hilkene
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Material deposition for high aspect ratio structures
- Patent number 9,852,902
- Issue date Dec 26, 2017
- Applied Materials, Inc.
- Jun Xue
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Resist fortification for magnetic media patterning
- Patent number 9,646,642
- Issue date May 9, 2017
- Applied Materials, Inc.
- Christopher Dennis Bencher
- G11 - INFORMATION STORAGE
Information Patent Grant
Conversion process utilized for manufacturing advanced 3D features...
- Patent number 9,553,174
- Issue date Jan 24, 2017
- Applied Materials, Inc.
- Ludovic Godet
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Bias voltage frequency controlled angular ion distribution in plasm...
- Patent number 9,520,267
- Issue date Dec 13, 2016
- Applied Mateirals, Inc.
- Ludovic Godet
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Demagnetization of magnetic media by C doping for HDD patterned med...
- Patent number 9,376,746
- Issue date Jun 28, 2016
- Applied Materials, Inc.
- Martin A. Hilkene
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for substrate surface planarization during magnetic pattern...
- Patent number 8,673,162
- Issue date Mar 18, 2014
- Applied Materials, Inc.
- Roman Gouk
- G11 - INFORMATION STORAGE
Information Patent Grant
Resist fortification for magnetic media patterning
- Patent number 8,658,242
- Issue date Feb 25, 2014
- Applied Materials, Inc.
- Christopher D. Bencher
- G11 - INFORMATION STORAGE
Information Patent Grant
Temperature control of a substrate during a plasma ion implantation...
- Patent number 8,586,952
- Issue date Nov 19, 2013
- Applied Materials, Inc.
- Martin A. Hilkene
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Methods and apparatus for conformal doping
- Patent number 8,501,605
- Issue date Aug 6, 2013
- Applied Materials, Inc.
- Kartik Santhanam
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods for quantitative measurement of a plasma immersion process
- Patent number 8,492,177
- Issue date Jul 23, 2013
- Applied Materials, Inc.
- Daping Yao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for removing implanted photo resist from hard disk drive sub...
- Patent number 8,354,035
- Issue date Jan 15, 2013
- Applied Materials, Inc.
- Martin A. Hilkene
- G11 - INFORMATION STORAGE
Information Patent Grant
Doping profile modification in P3I process
- Patent number 8,288,257
- Issue date Oct 16, 2012
- Applied Materials, Inc.
- Matthew D. Scotney-Castle
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Conformal doping in P3I chamber
- Patent number 8,129,261
- Issue date Mar 6, 2012
- Applied Materials, Inc.
- Peter I. Porshnev
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma immersion ion implantation process with chamber seasoning an...
- Patent number 8,003,500
- Issue date Aug 23, 2011
- Applied Materials, Inc.
- Manoj Vellaikal
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Removal of surface dopants from a substrate
- Patent number 7,989,329
- Issue date Aug 2, 2011
- Applied Materials, Inc.
- Kartik Ramaswamy
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma immersion ion implantation process with chamber seasoning an...
- Patent number 7,659,184
- Issue date Feb 9, 2010
- Applied Materials, Inc.
- Manoj Vellaikal
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
PLASMA-ENHANCED ANNEAL CHAMBER FOR WAFER OUTGASSING
- Publication number 20200402780
- Publication date Dec 24, 2020
- Applied Materials, Inc.
- Lara HAWRYLCHAK
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR NON-CONTACT LOW SUBSTRATE TEMPERATURE MEASUREMENT
- Publication number 20200381278
- Publication date Dec 3, 2020
- Applied Materials, Inc.
- Kim Ramkumar VELLORE
- G01 - MEASURING TESTING
Information Patent Application
MATERIAL DEPOSITION FOR HIGH ASPECT RATIO STRUCTURES
- Publication number 20180102248
- Publication date Apr 12, 2018
- Applied Materials, Inc.
- Jun Xue
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TEMPERATURE CONTROLLED REMOTE PLASMA CLEAN FOR EXHAUST DEPOSIT REMOVAL
- Publication number 20170304877
- Publication date Oct 26, 2017
- Applied Materials, Inc.
- Martin A. HILKENE
- C30 - CRYSTAL GROWTH
Information Patent Application
PLASMA-ENHANCED ANNEAL CHAMBER FOR WAFER OUTGASSING
- Publication number 20170294292
- Publication date Oct 12, 2017
- Applied Materials, Inc.
- Lara HAWRYLCHAK
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
RESIST FORTIFICATION FOR MAGNETIC MEDIA PATTERNING
- Publication number 20170206922
- Publication date Jul 20, 2017
- Applied Materials, Inc.
- Christopher Dennis BENCHER
- G11 - INFORMATION STORAGE
Information Patent Application
DEMAGNETIZATION OF MAGNETIC MEDIA BY C DOPING FOR HDD PATTERNED MED...
- Publication number 20160305013
- Publication date Oct 20, 2016
- Applied Materials, Inc.
- Martin A. HILKENE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MATERIAL DEPOSITION FOR HIGH ASPECT RATIO STRUCTURES
- Publication number 20160099154
- Publication date Apr 7, 2016
- Applied Materials, Inc.
- Jun Xue
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
BIAS VOLTAGE FREQUENCY CONTROLLED ANGULAR ION DISTRIBUTION IN PLASM...
- Publication number 20150371827
- Publication date Dec 24, 2015
- Ludovic Godet
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CONVERSION PROCESS UTILIZED FOR MANUFACTURING ADVANCED 3D FEATURES...
- Publication number 20150279974
- Publication date Oct 1, 2015
- Applied Materials, Inc.
- Ludovic GODET
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CARBON FILM HARDMASK STRESS REDUCTION BY HYDROGEN ION IMPLANTATION
- Publication number 20140273461
- Publication date Sep 18, 2014
- Applied Materials, Inc.
- Kwangduk Douglas LEE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Plasma Doping Of Silicon-Containing Films
- Publication number 20140273524
- Publication date Sep 18, 2014
- Victor Nguyen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
RESIST FORTIFICATION FOR MAGNETIC MEDIA PATTERNING
- Publication number 20140147700
- Publication date May 29, 2014
- Applied Materials, Inc.
- Christopher Dennis BENCHER
- G11 - INFORMATION STORAGE
Information Patent Application
METHODS AND APPARATUS FOR IMPLANTING A DOPANT MATERIAL
- Publication number 20130288469
- Publication date Oct 31, 2013
- Applied Materials, Inc.
- SHASHANK SHARMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEMAGNETIZATION OF MAGNETIC MEDIA BY C DOPING FOR HDD PATTERNED MED...
- Publication number 20130164455
- Publication date Jun 27, 2013
- Martin A. Hilkene
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS FOR QUANTITATIVE MEASUREMENT OF A PLASMA IMMERSION PROCESS
- Publication number 20130137197
- Publication date May 30, 2013
- Applied Materials, Inc.
- DAPING YAO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS FOR IMPLANTING DOPANT SPECIES IN A SUBSTRATE
- Publication number 20130095643
- Publication date Apr 18, 2013
- Applied Materials, Inc.
- KARTIK SANTHANAM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND APPARATUS FOR CONTROLLING POWER DISTRIBUTION IN SUBSTRA...
- Publication number 20130014894
- Publication date Jan 17, 2013
- Applied Materials, Inc.
- CANFENG LAI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND APPARATUS FOR CONTROLLING POWER DISTRIBUTION IN SUBSTRA...
- Publication number 20130017315
- Publication date Jan 17, 2013
- Applied Materials, Inc.
- CANFENG LAI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PRE OR POST-IMPLANT PLASMA TREATMENT FOR PLASMA IMMERSED ION IMPLAN...
- Publication number 20120302048
- Publication date Nov 29, 2012
- Applied Materials, Inc.
- Kartik Santhanam
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SURFACE DOSE RETENTION OF DOPANTS BY PRE-AMORPHIZATION AND POST IMP...
- Publication number 20120289036
- Publication date Nov 15, 2012
- Applied Materials, Inc.
- Kartik Santhanam
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND APPARATUS FOR CONFORMAL DOPING
- Publication number 20120238074
- Publication date Sep 20, 2012
- Applied Materials, Inc.
- KARTIK SANTHANAM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
RESIST FORTIFICATION FOR MAGNETIC MEDIA PATTERNING
- Publication number 20120196155
- Publication date Aug 2, 2012
- Applied Materials, Inc.
- Christopher D. Bencher
- G11 - INFORMATION STORAGE
Information Patent Application
INTEGRATED PLATFORM FOR IN-SITU DOPING AND ACTIVATION OF SUBSTRATES
- Publication number 20120088356
- Publication date Apr 12, 2012
- Applied Materials, Inc.
- KARTIK SANTHANAM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
REMOVAL OF SURFACE DOPANTS FROM A SUBSTRATE
- Publication number 20110256691
- Publication date Oct 20, 2011
- Kartik Ramaswamy
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS FOR SUBSTRATE SURFACE PLANARIZATION DURING MAGNETIC PATTERN...
- Publication number 20110143170
- Publication date Jun 16, 2011
- Applied Materials, Inc.
- Roman Gouk
- G11 - INFORMATION STORAGE
Information Patent Application
CHAMBER FOR PROCESSING HARD DISK DRIVE SUBSTRATES
- Publication number 20110127156
- Publication date Jun 2, 2011
- Applied Materials, Inc.
- Majeed A. Foad
- G11 - INFORMATION STORAGE
Information Patent Application
PLASMA ION IMPLANTATION PROCESS FOR PATTERNED DISC MEDIA APPLICATIONS
- Publication number 20110104393
- Publication date May 5, 2011
- Applied Materials, Inc.
- Martin A. Hilkene
- G11 - INFORMATION STORAGE
Information Patent Application
TEMPERATURE CONTROL OF A SUBSTRATE DURING A PLASMA ION IMPLANTATION...
- Publication number 20110101247
- Publication date May 5, 2011
- Applied Materials, Inc.
- Martin A. Hilkene
- G11 - INFORMATION STORAGE
Information Patent Application
Apparatus and Methods for Cyclical Oxidation and Etching
- Publication number 20110065276
- Publication date Mar 17, 2011
- Applied Materials, Inc.
- Udayan Ganguly
- H01 - BASIC ELECTRIC ELEMENTS

Matthew D. Scotney-Castle

Person

Patents Grantslast 30 patents

Plasma-enhanced anneal chamber for wafer outgassing

Plasma-enhanced anneal chamber for wafer outgassing

Temperature controlled remote plasma clean for exhaust deposit removal

Material deposition for high aspect ratio structures

Demagnetization of magnetic media by C doping for HDD patterned med...

Material deposition for high aspect ratio structures

Resist fortification for magnetic media patterning

Conversion process utilized for manufacturing advanced 3D features...

Bias voltage frequency controlled angular ion distribution in plasm...

Demagnetization of magnetic media by C doping for HDD patterned med...

Methods for substrate surface planarization during magnetic pattern...

Resist fortification for magnetic media patterning

Temperature control of a substrate during a plasma ion implantation...

Methods and apparatus for conformal doping

Methods for quantitative measurement of a plasma immersion process

Method for removing implanted photo resist from hard disk drive sub...

Doping profile modification in P3I process

Conformal doping in P3I chamber

Plasma immersion ion implantation process with chamber seasoning an...

Removal of surface dopants from a substrate

Plasma immersion ion implantation process with chamber seasoning an...

Patents Applicationslast 30 patents

PLASMA-ENHANCED ANNEAL CHAMBER FOR WAFER OUTGASSING

METHOD FOR NON-CONTACT LOW SUBSTRATE TEMPERATURE MEASUREMENT

MATERIAL DEPOSITION FOR HIGH ASPECT RATIO STRUCTURES

TEMPERATURE CONTROLLED REMOTE PLASMA CLEAN FOR EXHAUST DEPOSIT REMOVAL

PLASMA-ENHANCED ANNEAL CHAMBER FOR WAFER OUTGASSING

RESIST FORTIFICATION FOR MAGNETIC MEDIA PATTERNING

DEMAGNETIZATION OF MAGNETIC MEDIA BY C DOPING FOR HDD PATTERNED MED...

MATERIAL DEPOSITION FOR HIGH ASPECT RATIO STRUCTURES

BIAS VOLTAGE FREQUENCY CONTROLLED ANGULAR ION DISTRIBUTION IN PLASM...

CONVERSION PROCESS UTILIZED FOR MANUFACTURING ADVANCED 3D FEATURES...

CARBON FILM HARDMASK STRESS REDUCTION BY HYDROGEN ION IMPLANTATION

Plasma Doping Of Silicon-Containing Films

RESIST FORTIFICATION FOR MAGNETIC MEDIA PATTERNING

METHODS AND APPARATUS FOR IMPLANTING A DOPANT MATERIAL

DEMAGNETIZATION OF MAGNETIC MEDIA BY C DOPING FOR HDD PATTERNED MED...

METHODS FOR QUANTITATIVE MEASUREMENT OF A PLASMA IMMERSION PROCESS

METHODS FOR IMPLANTING DOPANT SPECIES IN A SUBSTRATE

METHODS AND APPARATUS FOR CONTROLLING POWER DISTRIBUTION IN SUBSTRA...

METHODS AND APPARATUS FOR CONTROLLING POWER DISTRIBUTION IN SUBSTRA...

PRE OR POST-IMPLANT PLASMA TREATMENT FOR PLASMA IMMERSED ION IMPLAN...

SURFACE DOSE RETENTION OF DOPANTS BY PRE-AMORPHIZATION AND POST IMP...

METHODS AND APPARATUS FOR CONFORMAL DOPING

RESIST FORTIFICATION FOR MAGNETIC MEDIA PATTERNING

INTEGRATED PLATFORM FOR IN-SITU DOPING AND ACTIVATION OF SUBSTRATES

REMOVAL OF SURFACE DOPANTS FROM A SUBSTRATE

METHODS FOR SUBSTRATE SURFACE PLANARIZATION DURING MAGNETIC PATTERN...

CHAMBER FOR PROCESSING HARD DISK DRIVE SUBSTRATES

PLASMA ION IMPLANTATION PROCESS FOR PATTERNED DISC MEDIA APPLICATIONS

TEMPERATURE CONTROL OF A SUBSTRATE DURING A PLASMA ION IMPLANTATION...

Apparatus and Methods for Cyclical Oxidation and Etching