Matthew E. Hansen

Person

Milford, CT, US

People

Patents Grantslast 30 patents

Information Patent Grant
Image-compensating addressable electrostatic chuck system
- Patent number 8,477,472
- Issue date Jul 2, 2013
- ASML Holding N.V.
- Matthew E. Hansen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Beam characterization monitor for sensing pointing or angle of an o...
- Patent number 8,013,999
- Issue date Sep 6, 2011
- ASML Holding N.V.
- Matthew E. Hansen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Methods for making holographic reticles for characterizing optical...
- Patent number 7,804,601
- Issue date Sep 28, 2010
- ASML Holding N.V.
- Matthew E. Hansen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Apparatus for optical beam shaping and associated methods
- Patent number 7,401,931
- Issue date Jul 22, 2008
- ASML Holding N.V.
- Matthew E. Hansen
- G02 - OPTICS
Information Patent Grant
Method for characterizing optical systems using holographic reticles
- Patent number 7,242,464
- Issue date Jul 10, 2007
- ASML Holdings N.V.
- Matthew E Hansen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Methods for optical beam shaping and diffusing
- Patent number 7,199,929
- Issue date Apr 3, 2007
- ASML Holdings N.V.
- Matthew E Hansen
- G02 - OPTICS
Information Patent Grant
Apparatus for optical system coherence testing
- Patent number 7,161,684
- Issue date Jan 9, 2007
- ASML Holding, N.V.
- Matthew E. Hansen
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus for optical beam shaping and diffusing and associated met...
- Patent number 7,137,714
- Issue date Nov 21, 2006
- ASML Holding N.V.
- Matthew E. Hansen
- G02 - OPTICS
Information Patent Grant
Method and apparatus for characterization of optical systems
- Patent number 7,081,961
- Issue date Jul 25, 2006
- ASML Holding N.V.
- Matthew E. Hansen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus for characterization of optical systems
- Patent number 7,016,025
- Issue date Mar 21, 2006
- ASML Holding N.V.
- Matthew E. Hansen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for optical system coherence testing
- Patent number 6,934,038
- Issue date Aug 23, 2005
- ASML Holding N.V.
- Matthew E. Hansen
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
Beam Pointing Monitor and Compensation Systems
- Publication number 20200278295
- Publication date Sep 3, 2020
- ASML Holding N.V.
- Matthew E. HANSEN
- G01 - MEASURING TESTING
Information Patent Application
Image-Compensating Addressable Electrostatic Chuck System
- Publication number 20120087058
- Publication date Apr 12, 2012
- ASML Holding N.V.
- Matthew E. Hansen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Beam Characterization Monitor for Sensing Pointing or Angle of an O...
- Publication number 20090161088
- Publication date Jun 25, 2009
- ASML Holding N.V.
- Matthew E. Hansen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
APPARATUS FOR OPTICAL BEAM SHAPING AND ASSOCIATED METHODS
- Publication number 20080019004
- Publication date Jan 24, 2008
- ASML Holding N.V.
- Matthew E. Hansen
- G02 - OPTICS
Information Patent Application
Apparatus for optical system coherence testing
- Publication number 20050219550
- Publication date Oct 6, 2005
- ASML Holding N.V.
- Matthew E. Hansen
- G01 - MEASURING TESTING
Information Patent Application
Apparatus for optical beam shaping and diffusing and associated met...
- Publication number 20050190451
- Publication date Sep 1, 2005
- ASML Holding N.V.
- Matthew E. Hansen
- G02 - OPTICS
Information Patent Application
Methods for making holographic reticles for characterizing optical...
- Publication number 20050083532
- Publication date Apr 21, 2005
- ASML Lithography Division
- Matthew E. Hansen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method and apparatus for characterization of optical systems
- Publication number 20040165194
- Publication date Aug 26, 2004
- Matthew E. Hansen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Apparatus for optical beam shaping and diffusing and associated met...
- Publication number 20020159152
- Publication date Oct 31, 2002
- ASML US, Inc.
- Matthew E. Hansen
- G02 - OPTICS
Information Patent Application
Method and apparatus for optical system coherence testing
- Publication number 20020027662
- Publication date Mar 7, 2002
- Matthew E. Hansen
- G01 - MEASURING TESTING
Information Patent Application
System and method for characterizing optical systems using holograp...
- Publication number 20020021460
- Publication date Feb 21, 2002
- Silicon Valley Group, Inc.
- Matthew E. Hansen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Matthew E. Hansen

Person

Patents Grantslast 30 patents

Image-compensating addressable electrostatic chuck system

Beam characterization monitor for sensing pointing or angle of an o...

Methods for making holographic reticles for characterizing optical...

Apparatus for optical beam shaping and associated methods

Method for characterizing optical systems using holographic reticles

Methods for optical beam shaping and diffusing

Apparatus for optical system coherence testing

Apparatus for optical beam shaping and diffusing and associated met...

Method and apparatus for characterization of optical systems

Method and apparatus for characterization of optical systems

Method for optical system coherence testing

Patents Applicationslast 30 patents

Beam Pointing Monitor and Compensation Systems

Image-Compensating Addressable Electrostatic Chuck System

Beam Characterization Monitor for Sensing Pointing or Angle of an O...

APPARATUS FOR OPTICAL BEAM SHAPING AND ASSOCIATED METHODS

Apparatus for optical system coherence testing

Apparatus for optical beam shaping and diffusing and associated met...

Methods for making holographic reticles for characterizing optical...

Method and apparatus for characterization of optical systems

Apparatus for optical beam shaping and diffusing and associated met...

Method and apparatus for optical system coherence testing

System and method for characterizing optical systems using holograp...