Matthew K. Miller

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Burlington, VT, US

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Patents Grantslast 30 patents

Information Patent Grant
Slurry injection technique for chemical-mechanical polishing
- Patent number 5,997,392
- Issue date Dec 7, 1999
- International Business Machines Corporation
- Timothy S. Chamberlin
- B24 - GRINDING POLISHING
Information Patent Grant
Vertical polishing device and method
- Patent number 5,928,062
- Issue date Jul 27, 1999
- International Business Machines Corporation
- Matthew Kilpatrick Miller
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing pad with controlled release of desired micro-encapsulated...
- Patent number 5,876,266
- Issue date Mar 2, 1999
- International Business Machines Corporation
- Matthew Kilpatrick Miller
- B24 - GRINDING POLISHING
Information Patent Grant
Flexible tilted wafer carrier
- Patent number 5,738,568
- Issue date Apr 14, 1998
- International Business Machines Corporation
- Robert A. Jurjevic
- B24 - GRINDING POLISHING