Matthew LIPSON

Person

Stamford, CT, US

People

Patents Grantslast 30 patents

Information Patent Grant
Method for producing a mirror of a microlithographic projection exp...
- Patent number 12,117,731
- Issue date Oct 15, 2024
- Carl Zeiss SMT GmbH
- Christoph Zaczek
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method to manufacture nano ridges in hard ceramic coatings
- Patent number 12,111,581
- Issue date Oct 8, 2024
- ASML Holding N.V.
- Mehmet Ali Akbas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Lithographic apparatus, substrate table, and method
- Patent number 11,988,971
- Issue date May 21, 2024
- ASML Holding N.V.
- Matthew Lipson
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithography supports with defined burltop topography
- Patent number 11,520,241
- Issue date Dec 6, 2022
- ASML Holding N.V.
- Matthew Lipson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrates and methods of using those substrates
- Patent number 11,016,401
- Issue date May 25, 2021
- ASML Holding N.V.
- Matthew Lipson
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Mask assembly
- Patent number 11,009,803
- Issue date May 18, 2021
- ASML Netherlands B.V.
- Matthias Kruizinga
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and method
- Patent number 10,908,518
- Issue date Feb 2, 2021
- ASML Holding N.V.
- Santiago E. Delpuerto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Mask assembly
- Patent number 10,558,129
- Issue date Feb 11, 2020
- ASML Netherlands B.V.
- Matthias Kruizinga
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Electrostatic clamp and a method for manufacturing the same
- Patent number 10,310,391
- Issue date Jun 4, 2019
- ASML Holding N.V.
- Matthew Lipson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatic clamp and a method for manufacturing the same
- Patent number 10,274,842
- Issue date Apr 30, 2019
- ASML Holding N.V.
- Matthew Lipson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 10,146,142
- Issue date Dec 4, 2018
- ASML Netherlands B.V.
- Erik Roelof Loopstra
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Lithographic apparatus and method
- Patent number 10,001,713
- Issue date Jun 19, 2018
- ASML Holding N.V.
- Santiago E. Del Puerto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 9,606,448
- Issue date Mar 28, 2017
- ASML Netherlands B.V.
- Erik Roelof Loopstra
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 9,442,388
- Issue date Sep 13, 2016
- ASML Netherlands B.V.
- Erik Roelof Loopstra
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Electrostatic clamp, lithographic apparatus and method of manufactu...
- Patent number 9,348,236
- Issue date May 24, 2016
- ASML Holding N.V.
- Peter Richard Helmus
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Lithographic apparatus, fluid combining unit and device manufacturi...
- Patent number 9,330,912
- Issue date May 3, 2016
- ASML Netherlands B.V.
- Johannes Catharinus Hubertus Mulkens
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Side seal for wet lens elements
- Patent number 9,195,148
- Issue date Nov 24, 2015
- ASML Holding N.V.
- Matthew Lipson
- G02 - OPTICS
Information Patent Grant
Lithographic apparatus and device manufacturing method involving fl...
- Patent number 8,755,027
- Issue date Jun 17, 2014
- ASML Netherlands B.V.
- Matthew Lipson
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Two-photon or higher-order absorbing optical materials for generati...
- Patent number 8,597,549
- Issue date Dec 3, 2013
- The California Institute of Technology
- Brian Cumpston
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 8,208,123
- Issue date Jun 26, 2012
- ASML Netherlands B.V.
- Erik Roelof Loopstra
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Bonding silicon silicon carbide to glass ceramics
- Patent number 8,168,017
- Issue date May 1, 2012
- ASML Holding N.V.
- Matthew Lipson
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Lithographic apparatus with a fluid combining unit and related devi...
- Patent number 8,045,135
- Issue date Oct 25, 2011
- ASML Netherlands B.V.
- Johannes Catharinus Hubertus Mulkens
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 8,027,026
- Issue date Sep 27, 2011
- ASML Netherlands B.V.
- Matthew Lipson
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 7,894,040
- Issue date Feb 22, 2011
- ASML Netherlands B.V.
- Matthew Lipson
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Side seal for wet lens elements
- Patent number 7,781,029
- Issue date Aug 24, 2010
- ASML Holding N.V.
- Matthew Lipson
- G02 - OPTICS
Information Patent Grant
Bonding silicon silicon carbide to glass ceramics
- Patent number 7,678,458
- Issue date Mar 16, 2010
- ASML Holding N.V.
- Matthew Lipson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Lithographic apparatus and device manufacturing method utilizing pl...
- Patent number 7,423,732
- Issue date Sep 9, 2008
- ASML Holding N.V.
- Matthew Lipson
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method to modify the spatial response of a pattern generator
- Patent number 7,335,398
- Issue date Feb 26, 2008
- ASML Holding N.V.
- Matthew Lipson
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Two-photon or higher-order absorbing optical materials for generati...
- Patent number 7,235,194
- Issue date Jun 26, 2007
- California Institute of Technology
- Brian Cumpston
- G11 - INFORMATION STORAGE
Information Patent Grant
System and method to block unwanted light reflecting from a pattern...
- Patent number 7,180,573
- Issue date Feb 20, 2007
- ASML Holding N.V.
- Matthew Lipson
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
METHOD TO MANUFACTURE NANO RIDGES IN HARD CERAMIC COATINGS
- Publication number 20240369947
- Publication date Nov 7, 2024
- ASML Holding N.V.
- Mehmet Ali AKBAS
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR PRODUCING A MIRROR OF A MICROLITHOGRAPHIC PROJECTION EXP...
- Publication number 20240192605
- Publication date Jun 13, 2024
- Carl Zeiss SMT GMBH
- Christoph ZACZEK
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
WAFER CLAMP HARD BURL PRODUCTION AND REFURBISHMENT
- Publication number 20230031443
- Publication date Feb 2, 2023
- ASML Holding N.V.
- Matthew LIPSON
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SYSTEMS AND METHODS FOR MANUFACTURING A DOUBLE-SIDED ELECTROSTATIC...
- Publication number 20230021360
- Publication date Jan 26, 2023
- ASML Holding N.V.
- Matthew LIPSON
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SPLIT DOUBLE SIDED WAFER AND RETICLE CLAMPS
- Publication number 20220236649
- Publication date Jul 28, 2022
- ASML Holding N.V.
- Matthew LIPSON
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LITHOGRAPHIC APPARATUS, SUBSTRATE TABLE, AND METHOD
- Publication number 20220082953
- Publication date Mar 17, 2022
- ASML Holding N.V.
- Matthew LIPSON
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
A METHOD TO MANUFACTURE NANO RIDGES IN HARD CERAMIC COATINGS
- Publication number 20210405539
- Publication date Dec 30, 2021
- ASML Holding N.V.
- Mehmet Ali AKBAS
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LITHOGRAPHY SUPPORTS WITH DEFINED BURLTOP TOPOGRAPHY
- Publication number 20210173312
- Publication date Jun 10, 2021
- ASML Holding N.V.
- Matthew LIPSON
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATES AND METHODS OF USING THOSE SUBSTRATES
- Publication number 20200073262
- Publication date Mar 5, 2020
- ASML Holding N.V.
- Matthew LIPSON
- B08 - CLEANING
Information Patent Application
Mask Assembly
- Publication number 20200057394
- Publication date Feb 20, 2020
- ASML NETHERLANDS B.V.
- Matthias KRUIZINGA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20190086819
- Publication date Mar 21, 2019
- ASML NETHERLANDS B.V.
- Erik Roelof LOOPSTRA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Mask Assembly
- Publication number 20180329314
- Publication date Nov 15, 2018
- Matthias KRUIZINGA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND METHOD
- Publication number 20180267414
- Publication date Sep 20, 2018
- ASML Holding N.V.
- Santiago E. DELPUERTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
An Electrostatic Clamp and a Method for Manufacturing the Same
- Publication number 20170242345
- Publication date Aug 24, 2017
- ASML Holding N.V.
- Matthew LIPSON
- C03 - GLASS MINERAL OR SLAG WOOL
Information Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20170160650
- Publication date Jun 8, 2017
- ASML NETHERLANDS B.V.
- Erik Roelof LOOPSTRA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic Apparatus and Method
- Publication number 20150370180
- Publication date Dec 24, 2015
- ASML Holding N.V.
- Santiago E. DEL PUERTO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20140347642
- Publication date Nov 27, 2014
- ASML NETHERLANDS B.V.
- Erik Roelof LOOPSTRA
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20140071420
- Publication date Mar 13, 2014
- ASML NETHERLANDS B.V.
- Erik Roelof Loopstra
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Application
ELECTROSTATIC CLAMP, LITHOGRAPHIC APPARATUS AND METHOD OF MANUFACTU...
- Publication number 20130308116
- Publication date Nov 21, 2013
- ASML Holding N.V.
- Peter Richard Helmus
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Application
LITHOGRAPHIC APPARATUS, FLUID COMBINING UNIT AND DEVICE MANUFACTURI...
- Publication number 20120013866
- Publication date Jan 19, 2012
- ASML Holding N.V.
- Johannes Catharinus Hubertus Mulkens
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20110317138
- Publication date Dec 29, 2011
- ASML Holding N.V.
- Matthew LIPSON
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20110134402
- Publication date Jun 9, 2011
- ASML NETHERLANDS B.V.
- Matthew LIPSON
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Side Seal for Wet Lens Elements
- Publication number 20100271605
- Publication date Oct 28, 2010
- ASML Holding N.V.
- Matthew Lipson
- G02 - OPTICS
Information Patent Application
Bonding Silicon Silicon Carbide to Glass Ceramics
- Publication number 20100128242
- Publication date May 27, 2010
- ASML Holding N.V.
- Matthew Lipson
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
TWO-PHOTON OR HIGHER-ORDER ABSORBING OPTICAL MATERIALS FOR GENERATI...
- Publication number 20080283804
- Publication date Nov 20, 2008
- California Institute of Technology
- Brian Cumpston
- C07 - ORGANIC CHEMISTRY
Information Patent Application
Bonding Silicon Silicon Carbide to Glass Ceramics
- Publication number 20080174054
- Publication date Jul 24, 2008
- ASML Holding N.V.
- Matthew Lipson
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic apparatus and device manufacturing method
- Publication number 20080117392
- Publication date May 22, 2008
- ASML NETHERLANDS B.V.
- Johannes Catharinus Hubertus Mulkens
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method of covering clear aperture of optic during deposition of glu...
- Publication number 20080038456
- Publication date Feb 14, 2008
- ASML Holding N.V.
- Matthew Lipson
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
Apparatus to Modify the Spatial Response of a Pattern Generator
- Publication number 20080017106
- Publication date Jan 24, 2008
- ASML Holding N.V.
- Matthew Lipson
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Side seal for wet lens elements
- Publication number 20060240365
- Publication date Oct 26, 2006
- ASML Holding N.V.
- Matthew Lipson
- G02 - OPTICS

Matthew LIPSON

Person

Patents Grantslast 30 patents

Method for producing a mirror of a microlithographic projection exp...

Method to manufacture nano ridges in hard ceramic coatings

Lithographic apparatus, substrate table, and method

Lithography supports with defined burltop topography

Substrates and methods of using those substrates

Mask assembly

Lithographic apparatus and method

Mask assembly

Electrostatic clamp and a method for manufacturing the same

Electrostatic clamp and a method for manufacturing the same

Lithographic apparatus and device manufacturing method

Lithographic apparatus and method

Lithographic apparatus and device manufacturing method

Lithographic apparatus and device manufacturing method

Electrostatic clamp, lithographic apparatus and method of manufactu...

Lithographic apparatus, fluid combining unit and device manufacturi...

Side seal for wet lens elements

Lithographic apparatus and device manufacturing method involving fl...

Two-photon or higher-order absorbing optical materials for generati...

Lithographic apparatus and device manufacturing method

Bonding silicon silicon carbide to glass ceramics

Lithographic apparatus with a fluid combining unit and related devi...

Lithographic apparatus and device manufacturing method

Lithographic apparatus and device manufacturing method

Side seal for wet lens elements

Bonding silicon silicon carbide to glass ceramics

Lithographic apparatus and device manufacturing method utilizing pl...

Method to modify the spatial response of a pattern generator

Two-photon or higher-order absorbing optical materials for generati...

System and method to block unwanted light reflecting from a pattern...

Patents Applicationslast 30 patents

METHOD TO MANUFACTURE NANO RIDGES IN HARD CERAMIC COATINGS

METHOD FOR PRODUCING A MIRROR OF A MICROLITHOGRAPHIC PROJECTION EXP...

WAFER CLAMP HARD BURL PRODUCTION AND REFURBISHMENT

SYSTEMS AND METHODS FOR MANUFACTURING A DOUBLE-SIDED ELECTROSTATIC...

SPLIT DOUBLE SIDED WAFER AND RETICLE CLAMPS

LITHOGRAPHIC APPARATUS, SUBSTRATE TABLE, AND METHOD

A METHOD TO MANUFACTURE NANO RIDGES IN HARD CERAMIC COATINGS

LITHOGRAPHY SUPPORTS WITH DEFINED BURLTOP TOPOGRAPHY

SUBSTRATES AND METHODS OF USING THOSE SUBSTRATES

Mask Assembly

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

Mask Assembly

LITHOGRAPHIC APPARATUS AND METHOD

An Electrostatic Clamp and a Method for Manufacturing the Same

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

Lithographic Apparatus and Method

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

ELECTROSTATIC CLAMP, LITHOGRAPHIC APPARATUS AND METHOD OF MANUFACTU...

LITHOGRAPHIC APPARATUS, FLUID COMBINING UNIT AND DEVICE MANUFACTURI...

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

Side Seal for Wet Lens Elements

Bonding Silicon Silicon Carbide to Glass Ceramics

TWO-PHOTON OR HIGHER-ORDER ABSORBING OPTICAL MATERIALS FOR GENERATI...

Bonding Silicon Silicon Carbide to Glass Ceramics

Lithographic apparatus and device manufacturing method

Method of covering clear aperture of optic during deposition of glu...

Apparatus to Modify the Spatial Response of a Pattern Generator

Side seal for wet lens elements