Matthew Mudrow

Person

Tigard, OR, US

People

Patents Grantslast 30 patents

Information Patent Grant
Spatially tunable deposition to compensate within wafer differentia...
- Patent number 12,338,531
- Issue date Jun 24, 2025
- Lam Research Corporation
- Fayaz A. Shaikh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Cooling of air actuated valve using actuating air
- Patent number 12,215,804
- Issue date Feb 4, 2025
- Lam Research Corporation
- Adriana Vintila
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Spatially tunable deposition to compensate within wafer differentia...
- Patent number 11,946,142
- Issue date Apr 2, 2024
- Lam Research Corporation
- Fayaz A. Shaikh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
High power low pressure UV bulb with plasma resistant coating
- Patent number 10,354,857
- Issue date Jul 16, 2019
- Lam Research Corporation
- Xiaolan Chen
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Grant
Rapid chamber clean using concurrent in-situ and remote plasma sources
- Patent number 10,161,034
- Issue date Dec 25, 2018
- Lam Research Corporation
- Keith Fox
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Turbulent flow spiral multi-zone precursor vaporizer
- Patent number 10,147,597
- Issue date Dec 4, 2018
- Lam Research Corporation
- James Forest Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
SPATIALLY TUNABLE DEPOSITION TO COMPENSATE WITHIN WAFER DIFFERENTIA...
- Publication number 20240167161
- Publication date May 23, 2024
- LAM RESEARCH CORPORATION
- Fayaz A. Shaikh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SPATIALLY TUNABLE DEPOSITION TO COMPENSATE WITHIN WAFER DIFFERENTIA...
- Publication number 20220298632
- Publication date Sep 22, 2022
- LAM RESEARCH CORPORATION
- Fayaz A. Shaikh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
BIDIRECTIONAL INDEXING APPARATUS
- Publication number 20220298631
- Publication date Sep 22, 2022
- LAM RESEARCH CORPORATION
- Adriana Vintila
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COOLING OF AIR ACTUATED VALVE USING ACTUATING AIR
- Publication number 20220213979
- Publication date Jul 7, 2022
- LAM RESEARCH CORPORATION
- Adriana Vintila
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Application
HIGH TEMPERATURE HEATING OF A SUBSTRATE IN A PROCESSING CHAMBER
- Publication number 20220199379
- Publication date Jun 23, 2022
- LAM RESEARCH CORPORATION
- James F. LEE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SHOWERHEAD WITH CONFIGURABLE GAS OUTLETS
- Publication number 20220136107
- Publication date May 5, 2022
- LAM RESEARCH CORPORATION
- James F. LEE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
RAPID CHAMBER CLEAN USING CONCURRENT IN-SITU AND REMOTE PLASMA SOURCES
- Publication number 20180305814
- Publication date Oct 25, 2018
- LAM RESEARCH CORPORATION
- Keith Fox
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HIGH POWER LOW PRESSURE UV BULB WITH PLASMA RESISTANT COATING
- Publication number 20180182607
- Publication date Jun 28, 2018
- LAM RESEARCH CORPORATION
- Xiaolan Chen
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE

Matthew Mudrow

Person

Patents Grantslast 30 patents

Spatially tunable deposition to compensate within wafer differentia...

Cooling of air actuated valve using actuating air

Spatially tunable deposition to compensate within wafer differentia...

High power low pressure UV bulb with plasma resistant coating

Rapid chamber clean using concurrent in-situ and remote plasma sources

Turbulent flow spiral multi-zone precursor vaporizer

Patents Applicationslast 30 patents

SPATIALLY TUNABLE DEPOSITION TO COMPENSATE WITHIN WAFER DIFFERENTIA...

SPATIALLY TUNABLE DEPOSITION TO COMPENSATE WITHIN WAFER DIFFERENTIA...

BIDIRECTIONAL INDEXING APPARATUS

COOLING OF AIR ACTUATED VALVE USING ACTUATING AIR

HIGH TEMPERATURE HEATING OF A SUBSTRATE IN A PROCESSING CHAMBER

SHOWERHEAD WITH CONFIGURABLE GAS OUTLETS

RAPID CHAMBER CLEAN USING CONCURRENT IN-SITU AND REMOTE PLASMA SOURCES

HIGH POWER LOW PRESSURE UV BULB WITH PLASMA RESISTANT COATING