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Matthew P. McClellan
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Lancaster, MA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Platen control
Patent number
9,012,337
Issue date
Apr 21, 2015
Varian Semiconductor Equipment Associates, Inc.
Shengwu Chang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Ion beam tuning
Patent number
8,330,125
Issue date
Dec 11, 2012
Varian Semiconductor Equipment Associates, Inc.
Shengwu Chang
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
PLATEN CONTROL
Publication number
20120088035
Publication date
Apr 12, 2012
Varian Semiconductor Equipment Associates, Inc.
Shengwu Chang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ION BEAM TUNING
Publication number
20120068081
Publication date
Mar 22, 2012
VARIAN SEMICONDUCTOR EQUIPMENT ASSOCISTES, INC.
Shengwu Chang
H01 - BASIC ELECTRIC ELEMENTS