Matthew R. Boston

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Tucson, AZ, US

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Patents Grantslast 30 patents

Information Patent Grant
Compliant pad wafer chuck
- Patent number 7,541,826
- Issue date Jun 2, 2009
- KLA-Tencor Corporation
- Chris L. Koliopoulos
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
Compliant pad wafer chuck
- Publication number 20060255819
- Publication date Nov 16, 2006
- Phase Shift Technology, Inc.
- Chris L. Koliopoulos
- G01 - MEASURING TESTING