Matthew Thorum

Person

Portland, OR, US

People

Patents Grantslast 30 patents

Information Patent Grant
Monitoring electrolytes during electroplating
- Patent number 10,774,438
- Issue date Sep 15, 2020
- Lam Research Corporation
- Matthew Sherman Thorum
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
TSV bath evaluation using field versus feature contrast
- Patent number 10,508,359
- Issue date Dec 17, 2019
- Lam Research Corporation
- Lee Brogan
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Monitoring electrolytes during electroplating
- Patent number 10,094,038
- Issue date Oct 9, 2018
- Lam Research Corporation
- Matthew Sherman Thorum
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Method and apparatus for electroplating semiconductor wafer when co...
- Patent number 9,816,196
- Issue date Nov 14, 2017
- Novellus Systems, Inc.
- Tighe A. Spurlin
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
TSV bath evaluation using field versus feature contrast
- Patent number 9,689,083
- Issue date Jun 27, 2017
- Lam Research Corporation
- Lee Brogan
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Pretreatment of nickel and cobalt liners for electrodeposition of c...
- Patent number 9,617,648
- Issue date Apr 11, 2017
- Lam Research Corporation
- Matthew S. Thorum
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Alkaline pretreatment for electroplating
- Patent number 9,435,049
- Issue date Sep 6, 2016
- Lam Research Corporation
- Matthew Thorum
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
MONITORING ELECTROLYTES DURING ELECTROPLATING
- Publication number 20190010626
- Publication date Jan 10, 2019
- LAM RESEARCH CORPORATION
- Matthew Sherman Thorum
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
METHOD AND APPARATUS FOR ELECTROPLATING SEMICONDUCTOR WAFER WHEN CO...
- Publication number 20180030611
- Publication date Feb 1, 2018
- Novellus Systems, Inc.
- Tighe A. Spurlin
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
TSV BATH EVALUATION USING FIELD VERSUS FEATURE CONTRAST
- Publication number 20170241041
- Publication date Aug 24, 2017
- LAM RESEARCH CORPORATION
- Lee Brogan
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
POLARIZATION STABILIZER ADDITIVE FOR ELECTROPLATING
- Publication number 20160355939
- Publication date Dec 8, 2016
- LAM RESEARCH CORPORATION
- Matthew Sherman Thorum
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
MONITORING ELECTROLYTES DURING ELECTROPLATING
- Publication number 20160298256
- Publication date Oct 13, 2016
- LAM RESEARCH CORPORATION
- Matthew Sherman Thorum
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
PRETREATMENT OF NICKEL AND COBALT LINERS FOR ELECTRODEPOSITION OF C...
- Publication number 20160258078
- Publication date Sep 8, 2016
- LAM RESEARCH CORPORATION
- Matthew S. Thorum
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
ALKALINE PRETREATMENT FOR ELECTROPLATING
- Publication number 20150140814
- Publication date May 21, 2015
- LAM RESEARCH CORPORATION
- Matthew Thorum
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
TSV BATH EVALUATION USING FIELD VERSUS FEATURE CONTRAST
- Publication number 20140367279
- Publication date Dec 18, 2014
- LAM RESEARCH CORPORATION
- Lee Brogan
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
METHOD AND APPARATUS FOR ELECTROPLATING SEMICONDUCTOR WAFER WHEN CO...
- Publication number 20130284604
- Publication date Oct 31, 2013
- Tighe A. Spurlin
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR

Matthew Thorum

Person

Patents Grantslast 30 patents

Monitoring electrolytes during electroplating

TSV bath evaluation using field versus feature contrast

Monitoring electrolytes during electroplating

Method and apparatus for electroplating semiconductor wafer when co...

TSV bath evaluation using field versus feature contrast

Pretreatment of nickel and cobalt liners for electrodeposition of c...

Alkaline pretreatment for electroplating

Patents Applicationslast 30 patents

MONITORING ELECTROLYTES DURING ELECTROPLATING

METHOD AND APPARATUS FOR ELECTROPLATING SEMICONDUCTOR WAFER WHEN CO...

TSV BATH EVALUATION USING FIELD VERSUS FEATURE CONTRAST

POLARIZATION STABILIZER ADDITIVE FOR ELECTROPLATING

MONITORING ELECTROLYTES DURING ELECTROPLATING

PRETREATMENT OF NICKEL AND COBALT LINERS FOR ELECTRODEPOSITION OF C...

ALKALINE PRETREATMENT FOR ELECTROPLATING

TSV BATH EVALUATION USING FIELD VERSUS FEATURE CONTRAST

METHOD AND APPARATUS FOR ELECTROPLATING SEMICONDUCTOR WAFER WHEN CO...