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Matthias C. Krantz
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Aptos, CA, US
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Patents Grants
last 30 patents
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Patent Grant
Efficient phase defect detection system and method
Patent number
6,674,522
Issue date
Jan 6, 2004
KLA-Tencor Technologies Corporation
Matthias C. Krantz
G01 - MEASURING TESTING
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Patent Grant
Conventional and confocal multi-spot scanning optical microscope
Patent number
6,248,988
Issue date
Jun 19, 2001
KLA-Tencor Corporation
Matthias C. Krantz
G02 - OPTICS
Patents Applications
last 30 patents
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Patent Application
Efficient phase defect detection system and method
Publication number
20020171825
Publication date
Nov 21, 2002
KLA-TENCOR TECHNOLOGIES, INC.
Matthias C. Krantz
G01 - MEASURING TESTING