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Matthias Conradi
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Munich, DE
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last 30 patents
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Patent Grant
Spacer displacement device for a wafer illumination unit and wafer...
Patent number
9,958,795
Issue date
May 1, 2018
SUSS MicroTec Lithography GmbH
Matthias Conradi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method and device for active wedge error compensation between two o...
Patent number
9,329,473
Issue date
May 3, 2016
Suss MicroTec Lithography GmbH
Sven Hansen
B82 - NANO-TECHNOLOGY
Patents Applications
last 30 patents
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Patent Application
Spacer Displacement Device for a Wafer Illumination Unit and Wafer...
Publication number
20170017169
Publication date
Jan 19, 2017
SUSS MICROTEC LITHOGRAPHY GMBH
Matthias Conradi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Chuck for Suction and Holding a Wafer
Publication number
20160240414
Publication date
Aug 18, 2016
SUSS MICROTEC LITHOGRAPHY GMBH
Matthias Conradi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD AND DEVICE FOR ACTIVE WEDGE ERROR COMPENSATION BETWEEN TWO O...
Publication number
20120299208
Publication date
Nov 29, 2012
Sven Hansen
B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL