Matthias DREHER

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Ulm, DE

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Patents Grantslast 30 patents

Information Patent Grant
Method for calibrating a measuring apparatus
- Patent number 11,774,237
- Issue date Oct 3, 2023
- Carl Zeiss SMT GmbH
- Jochen Hetzler
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for determining a deviation of an actual shape...
- Patent number 8,345,262
- Issue date Jan 1, 2013
- Carl Zeiss SMT GmbH
- Frank Schillke
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for determining a deviation of an actual shape...
- Patent number 8,104,905
- Issue date Jan 31, 2012
- Carl Zeiss SMT GmbH
- Frank Schillke
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for interferometrically measuring the shape of...
- Patent number 7,791,737
- Issue date Sep 7, 2010
- Carl Zeiss SMT AG
- Bernd Doerband
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
MEASUREMENT DEVICE FOR INTERFEROMETRIC MEASUREMENT OF A SURFACE SHAPE
- Publication number 20240077305
- Publication date Mar 7, 2024
- Carl Zeiss SMT GMBH
- Jochen HETZLER
- G01 - MEASURING TESTING
Information Patent Application
MEASURING APPARATUS FOR INTERFEROMETRIC SHAPE MEASUREMENT
- Publication number 20220349700
- Publication date Nov 3, 2022
- Carl Zeiss SMT GMBH
- Jochen HETZLER
- G01 - MEASURING TESTING
Information Patent Application
METHOD FOR CALIBRATING A MEASURING APPARATUS
- Publication number 20220187061
- Publication date Jun 16, 2022
- Carl Zeiss SMT GMBH
- Jochen HETZLER
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND APPARATUS FOR DETERMINING A DEVIATION OF AN ACTUAL SHAPE...
- Publication number 20120127481
- Publication date May 24, 2012
- Carl Zeiss SMT GMBH
- Frank SCHILLKE
- G01 - MEASURING TESTING
Information Patent Application
Method and Apparatus for Interferometrically Measuring the Shape of...
- Publication number 20090237672
- Publication date Sep 24, 2009
- Carl Zeiss SMT AG
- Bernd Doerband
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND APPARATUS FOR DETERMINING A DEVIATION OF AN ACTUAL SHAPE...
- Publication number 20090128829
- Publication date May 21, 2009
- Carl Zeiss SMT AG
- Frank Schillke
- G01 - MEASURING TESTING