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Matthias Fehr
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Pulsnitz, DE
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Patents Grants
last 30 patents
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Patent Grant
Detection of adhesive residue on a wafer
Patent number
11,309,196
Issue date
Apr 19, 2022
Infineon Technologies AG
Robert Muhr
G06 - COMPUTING CALCULATING COUNTING
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Patent Grant
Holder for semiconductor wafers in a brush-cleaning installation
Patent number
6,804,851
Issue date
Oct 19, 2004
Infineon Technologies AG
Matthias Fehr
B08 - CLEANING
Patents Applications
last 30 patents
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Patent Application
Detection of Adhesive Residue on a Wafer
Publication number
20200105552
Publication date
Apr 2, 2020
Robert Muhr
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
Holder for semiconductor wafers in a brush-cleaning installation
Publication number
20020160701
Publication date
Oct 31, 2002
Matthias Fehr
H01 - BASIC ELECTRIC ELEMENTS