Matthias Firnkes

Person

Walpertskirchen, DE

People

Patents Grantslast 30 patents

Information Patent Grant
Methods of determining aberrations of a charged particle beam, and...
- Patent number 11,810,753
- Issue date Nov 7, 2023
- ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
- Dominik Ehberger
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method of determining the beam convergence of a focused charged par...
- Patent number 11,791,128
- Issue date Oct 17, 2023
- ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
- Dominik Ehberger
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Aberration corrector and method of aligning aberration corrector
- Patent number 11,501,947
- Issue date Nov 15, 2022
- ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
- Matthias Firnkes
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrode arrangement, contact assembly for an electrode arrangemen...
- Patent number 11,177,114
- Issue date Nov 16, 2021
- ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
- Matthias Firnkes
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Secondary charged particle imaging system
- Patent number 11,094,501
- Issue date Aug 17, 2021
- ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
- Matthias Firnkes
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam device, objective lens module, electrode devi...
- Patent number 10,991,544
- Issue date Apr 27, 2021
- ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
- Matthias Firnkes
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for imaging a secondary charged particle beam wit...
- Patent number 10,103,004
- Issue date Oct 16, 2018
- ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
- Matthias Firnkes
- G01 - MEASURING TESTING
Information Patent Grant
System for imaging a secondary charged particle beam with adaptive...
- Patent number 9,953,805
- Issue date Apr 24, 2018
- ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
- Matthias Firnkes
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Signal charged particle deflection device, signal charged particle...
- Patent number 9,805,908
- Issue date Oct 31, 2017
- Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
- Matthias Firnkes
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam device, system for a charged particle beam de...
- Patent number 9,666,406
- Issue date May 30, 2017
- ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
- Stefan Lanio
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System for imaging a signal charged particle beam, method for imagi...
- Patent number 9,666,405
- Issue date May 30, 2017
- ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
- Stefan Lanio
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Beam separator device, charged particle beam device and methods of...
- Patent number 9,472,373
- Issue date Oct 18, 2016
- ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
- Stefan Lanio
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Switchable multi perspective detector, optics therefore and method...
- Patent number 8,963,083
- Issue date Feb 24, 2015
- ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
- Matthias Firnkes
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
ABERRATION CORRECTOR, A CHARGED PARTICLE BEAM APPARATUS, A METHOD O...
- Publication number 20240355576
- Publication date Oct 24, 2024
- ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH
- Florian Lampersberger
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF DETERMINING A BRIGHTNESS OF A CHARGED PARTICLE BEAM, METH...
- Publication number 20240126057
- Publication date Apr 18, 2024
- ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH
- John Breuer
- G01 - MEASURING TESTING
Information Patent Application
METHODS OF DETERMINING ABERRATIONS OF A CHARGED PARTICLE BEAM, AND...
- Publication number 20230113857
- Publication date Apr 13, 2023
- ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH
- Dominik Ehberger
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD OF DETERMINING THE BEAM CONVERGENCE OF A FOCUSED CHARGED PAR...
- Publication number 20230116466
- Publication date Apr 13, 2023
- ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH
- Dominik Ehberger
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ABERRATION CORRECTOR AND METHOD OF ALIGNING ABERRATION CORRECTOR
- Publication number 20220375713
- Publication date Nov 24, 2022
- ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH
- Matthias Firnkes
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SECONDARY CHARGED PARTICLE IMAGING SYSTEM
- Publication number 20210151284
- Publication date May 20, 2021
- ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH
- Matthias Firnkes
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM DEVICE, OBJECTIVE LENS MODULE, ELECTRODE DEVI...
- Publication number 20200381208
- Publication date Dec 3, 2020
- ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH
- Matthias Firnkes
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM FOR IMAGING A SECONDARY CHARGED PARTICLE BEAM WITH ADAPTIVE...
- Publication number 20170076910
- Publication date Mar 16, 2017
- ICT Integrated Circuit Testing Gesellscaft für Halbleiterprüftechnik mbH
- Matthias Firnkes
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND METHOD FOR IMAGING A SECONDARY CHARGED PARTICLE BEAM WIT...
- Publication number 20170003235
- Publication date Jan 5, 2017
- ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH
- Matthias Firnkes
- G01 - MEASURING TESTING
Information Patent Application
SIGNAL CHARGED PARTICLE DEFLECTION DEVICE, SIGNAL CHARGED PARTICLE...
- Publication number 20160240347
- Publication date Aug 18, 2016
- ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH
- Matthias Firnkes
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SWITCHABLE MULTI PERSPECTIVE DETECTOR, OPTICS THEREFORE AND METHOD...
- Publication number 20150021474
- Publication date Jan 22, 2015
- ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik GmbH
- Matthias FIRNKES
- H01 - BASIC ELECTRIC ELEMENTS

Matthias Firnkes

Person

Patents Grantslast 30 patents

Methods of determining aberrations of a charged particle beam, and...

Method of determining the beam convergence of a focused charged par...

Aberration corrector and method of aligning aberration corrector

Electrode arrangement, contact assembly for an electrode arrangemen...

Secondary charged particle imaging system

Charged particle beam device, objective lens module, electrode devi...

System and method for imaging a secondary charged particle beam wit...

System for imaging a secondary charged particle beam with adaptive...

Signal charged particle deflection device, signal charged particle...

Charged particle beam device, system for a charged particle beam de...

System for imaging a signal charged particle beam, method for imagi...

Beam separator device, charged particle beam device and methods of...

Switchable multi perspective detector, optics therefore and method...

Patents Applicationslast 30 patents

ABERRATION CORRECTOR, A CHARGED PARTICLE BEAM APPARATUS, A METHOD O...

METHOD OF DETERMINING A BRIGHTNESS OF A CHARGED PARTICLE BEAM, METH...

METHODS OF DETERMINING ABERRATIONS OF A CHARGED PARTICLE BEAM, AND...

METHOD OF DETERMINING THE BEAM CONVERGENCE OF A FOCUSED CHARGED PAR...

ABERRATION CORRECTOR AND METHOD OF ALIGNING ABERRATION CORRECTOR

SECONDARY CHARGED PARTICLE IMAGING SYSTEM

CHARGED PARTICLE BEAM DEVICE, OBJECTIVE LENS MODULE, ELECTRODE DEVI...

SYSTEM FOR IMAGING A SECONDARY CHARGED PARTICLE BEAM WITH ADAPTIVE...

SYSTEM AND METHOD FOR IMAGING A SECONDARY CHARGED PARTICLE BEAM WIT...

SIGNAL CHARGED PARTICLE DEFLECTION DEVICE, SIGNAL CHARGED PARTICLE...

SWITCHABLE MULTI PERSPECTIVE DETECTOR, OPTICS THEREFORE AND METHOD...