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Matthias Ilg
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Richmond, VA, US
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last 30 patents
Information
Patent Grant
Dual work function CMOS device
Patent number
6,492,688
Issue date
Dec 10, 2002
Siemens Aktiengesellschaft
Matthias Ilg
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Integrated circuits and manufacturing methods
Patent number
6,492,282
Issue date
Dec 10, 2002
Siemens Aktiengesellschaft
Dirk Tobben
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Reliable polycide gate stack with reduced sheet resistance and thic...
Patent number
6,376,348
Issue date
Apr 23, 2002
Siemens Aktiengesellschaft
Martin Schrems
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for forming a high surface area trench capacitor
Patent number
6,319,787
Issue date
Nov 20, 2001
Siemens Aktiengesellschaft
Gerhard Enders
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Memory cell having trench capacitor and vertical, dual-gated transi...
Patent number
6,262,448
Issue date
Jul 17, 2001
Infineon Technologies North America Corp.
Gerhard Enders
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for the fabrication of a doped silicon layer
Patent number
6,197,666
Issue date
Mar 6, 2001
Siemens Aktiengesellschaft
Herbert Schafer
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Fabrication of trench capacitors using disposable hard mask
Patent number
6,190,955
Issue date
Feb 20, 2001
International Business Machines Corporation
Matthias Ilg
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Insitu doped metal policide
Patent number
6,130,145
Issue date
Oct 10, 2000
Siemens Aktiengesellschaft
Matthias Ilg
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Gapfill of semiconductor structure using doped silicate glasses
Patent number
6,096,654
Issue date
Aug 1, 2000
Siemens Aktiengesellschaft
Markus M. Kirchhoff
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Low temperature reflow dielectric-fluorinated BPSG
Patent number
6,057,250
Issue date
May 2, 2000
International Business Machines Corporation
Markus Kirchhoff
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Gapfill of semiconductor structure using doped silicate glasses
Patent number
6,048,475
Issue date
Apr 11, 2000
Siemens Aktiengesellschaft
Markus M. Kirchhoff
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Advanced damascene planar stack capacitor fabrication method
Patent number
6,027,968
Issue date
Feb 22, 2000
International Business Machines Corporation
Son Van Nguyen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of planarizing the semiconductor structure
Patent number
5,963,837
Issue date
Oct 5, 1999
Siemens Aktiengesellschaft
Matthias Ilg
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Deposition of carbon into nitride layer for improved selectivity of...
Patent number
5,935,873
Issue date
Aug 10, 1999
Siemens Aktiengesellschaft
Bruno Spuler
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Dishing resistance
Patent number
5,928,959
Issue date
Jul 27, 1999
Siemens Aktiengesellschaft
Kai Huckels
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Uniform distribution of reactants in a device layer
Patent number
5,807,792
Issue date
Sep 15, 1998
Siemens Aktiengesellschaft
Matthias Ilg
C30 - CRYSTAL GROWTH
Information
Patent Grant
Method for forming semiconductor structure using modulation doped s...
Patent number
5,770,469
Issue date
Jun 23, 1998
Lam Research Corporation
Kevin J. Uram
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Advanced damascene planar stack capacitor fabrication method
Patent number
5,753,948
Issue date
May 19, 1998
International Business Machines Corporation
Son Van Nguyen
H01 - BASIC ELECTRIC ELEMENTS